SPECIMEN CHAMBER FOR SCANNING ELECTRON BEAM INSTRUMENTS - Patent 0263839

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EP 0 263 839 A1

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(43)	Date of publication:
	20.04.1988 Bulletin 1988/16

(21)	Application number: 87901437.0

(22)	Date of filing: 16.02.1987

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International Patent Classification (IPC):

H01J 37/ 20^{( . )}

H01J 37/ 28^{( . )}

(86)	International application number:
	PCT/EP1987/000077

(87)	International publication number:
	WO 1987/005150 (27.08.1987 Gazette 1987/19)

(84)	Designated Contracting States:
	AT BE CH DE FR GB IT LI LU NL SE

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Priority:

18.02.1986 GB 19860004004
03.12.1986 GB 19860028900

(71)	Applicant: CAMBRIDGE INSTRUMENTS LIMITED
	Cambridge CB3 8EL (GB)

(72)	Inventor:
	SHAH, Jitendra, Shantilal Chew Magna Bristol BS18 8QQ (GB)

(74)	Representative: Foster, David Martyn
	MATHISEN MACARA & CO. The Coach House 6-8 Swakeleys Road Ickenham Uxbridge UB10 8BZ Ickenham Uxbridge UB10 8BZ (GB)

(54)	SPECIMEN CHAMBER FOR SCANNING ELECTRON BEAM INSTRUMENTS