METHOD OF TRANSPORTING PRODUCTS IN A MANUFACTURING PROCESS - Patent 0283477

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EP 0 283 477 A1

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(43)	Date of publication:
	28.09.1988 Bulletin 1988/39

(21)	Application number: 87900912.0

(22)	Date of filing: 20.01.1987

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International Patent Classification (IPC):

B65G 49/ 00^{( . )}
C23C 14/ 56^{( . )}

B65G 49/ 07^{( . )}
H01L 21/ 677^{( . )}

(86)	International application number:
	PCT/SE1987/000022

(87)	International publication number:
	WO 1987/004414 (30.07.1987 Gazette 1987/17)

(84)	Designated Contracting States:
	AT BE CH DE FR GB IT LI NL

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Priority:

20.01.1986 SE 19860000228

(71)	Applicant: APPLIED VACUUM SCANDINAVIA AB
	S-580 05 Linköping (SE)

(72)	Inventor:
	NORDLANDER, Johan S-585 90 Linköping (SE)

(74)	Representative: Willquist, Bo Lorentz
	Albihn Willquist AB S:t Larsgatan 23 S-582 24 Linköping S-582 24 Linköping (SE)

(54)	METHOD OF TRANSPORTING PRODUCTS IN A MANUFACTURING PROCESS