[0001] This invention relates to a M0S semiconductor integrated circuit, and more particularly
to a sub-booster circuit for raising an output voltage of a main booster circuit
which generates a voltage higher than a power source voltage.
[0002] In recent years, floating gate type nonvolatile semiconductor memories called EPROM
and EEPROM have rapidly spread. Data can be electrically written into the EPROM and
erased by application of ultraviolet rays. In the EEPROM, data can be written and
erased electrically. This type of semiconductor memory includes, for example, a memory
which utilizes the Fowler-Nordheim tunneling effect. In the memory utilizing the tunneling
effect, electrons are injected into or discharged from the floating gate via the thin
oxide film in the data write-in or erasing operation. In the data write-in or erasing
operation, there is little current consumption. Therefore, the data write-in or erasing
operation can be effected by using an output voltage of a booster circuit provided
in the memory instead of externally applying a high voltage required for the data
write-in or erasing operation. Thus, even if the booster circuit has a low current
supplying ability, it can be used without any serious problem.
[0003] Recently, the circuit scale of the nonvolatile memory becomes large and the number
of peripheral circuits (load circuits) to be supplied with a stepped-up voltage increases.
Therefore, the load capacitance of the booster circuit increases, thereby making it
necessary to take a long step-up time for raising an output voltage to a desired
level. In the semiconductor integrated circuit, the load circuits to be supplied
with an output voltage of the booster circuit are divided into a plurality of blocks
and transfer gates are connected to input terminals of the respective blocks. The
transfer gates are selectively activated by a control signal for selecting one of
the blocks. An output voltage of the booster circuit is supplied to the load circuit
block via the selected transfer gate. Thus, the load capacitance of the booster circuit
is lowered, preventing the voltage step-up time from being increased.
[0004] As described above, in the case where the load circuits are divided into a plurality
of blocks, it is necessary to apply a voltage higher than an output voltage of the
booster circuit to the gate of the transfer gate. In other words, it is necessary
to set the control signal for controlling the transfer gate higher than the output
voltage of the booster circuit. This is because the voltage supplied to the load circuit
block is lowered by the threshold voltage of the transfer gate. For this reason, a
sub-booster circuit is used in addition to a main booster circuit in order to further
raise a voltage which has been stepped up by the main booster circuit. An output voltage
of the sub-booster circuit is higher than the output voltage of the main booster
circuit by more than the threshold voltage of the transfer gate. The output voltage
of the sub-booster circuit is supplied to the transfer gates to selectively activate
the transfer gate. Since the transfer gate is selectively activated by a high voltage
(equal to or higher than the sum of an output voltage of the main booster circuit
and the threshold voltage of the transfer gate) of the sub-booster circuit, a voltage
supplied from the booster circuit to the load circuit block will not be lowered by
the threshold voltage of the transfer gate. Therefore, the output voltage of the booster
circuit is efficiently supplied to the selected load circuit block.
[0005] With the use of the sub-booster circuit, the load capacitance of the main booster
circuit can be lowered, thereby permitting a stepped-up voltage to be supplied to
the load circuit in a brief time without lowering the output voltage of the main booster
circuit. In this way, a high voltage used for writing or erasing data in a semiconductor
memory can be generated in the semiconductor integrated circuit (such as a nonvolatile
semiconductor memory).
[0006] Further, in a MOS semiconductor integrated circuit, a MOS transistor is used in the
input stage of the load circuit, and a stepped-up voltage is applied to the gate of
the MOS transistor. Therefore, a voltage supplied to the internal circuit of the load
circuit is lowered by the threshold voltage of the input stage MOS transistor. For
this reason, it is preferable to further raise an output voltage of the main booster
circuit by means of the sub-booster circuit and supply it to the gate of the input
stage MOS transistor even when the load circuits are not divided into a plurality
of blocks.
[0007] For the reasons described above, it is required to use a highly efficient sub-booster
circuit. However, the voltage step-up efficiency of the sub-booster circuit which
is commonly used is not sufficiently high to further raise the output voltage of the
main booster circuit, and therefore it is strongly required to develop the sub-booster
circuit.
[0008] An object of this invention is to provide a sub-booster circuit capable of raising
an output voltage of a main booster circuit at a high efficiency.
[0009] This object can be attained by a sub-booster circuit comprising a first switching
circuit which is connected at one end to receive an output voltage of a main booster
circuit and has a control input terminal connected to an input terminal of an object
circuit to be supplied with a stepped-up voltage; a second switching circuit having
one end and a control terminal connected to the other end of the first switching
circuit and the other end connected to the input terminal of the object circuit, a
potential for turning on the second switching circuit being larger in its absolute
value than a potential for turning on the first switching circuit; and a capacitance
circuit having a first electrode connected to a connection node between the first
and second switching circuits and a second electrode connected to receive a clock
pulse signal, the capacitance circuit functioning as a capacitor when a potential
at the first electrode is substantially equal to or higher than the potential for
turning on the second switching circuit and exhibiting no capacitance property when
the potential at the first electrode is lower than the potential for turning on the
second switching circuit.
[0010] With this construction, ON-resistances of the first and second switching circuits
can be set to a small value and the second switching circuit can be kept in the off
condition when the clock pulse falls. Therefore, a sub-booster circuit is provided
in which reduction in the output voltage caused by the presence of the first and
second switching circuits may be suppressed to a minimum and which is operated to
raise a voltage at a high step-up efficiency and high reliability.
[0011] This invention can be more fully understood from the following detailed description
when taken in conjunction with the accompanying drawings, in which:
Fig. 1 is a circuit diagram showing a sub-booster circuit according to a first embodiment
of this invention;
Fig. 2 is a timing chart for illustrating the operation of a circuit shown in Fig.
1;
Fig. 3 is a circuit diagram showing a sub-booster circuit according to a second embodiment
of this invention; and
Fig. 4 is a circuit diagram showing the construction of a selection circuit used
in the circuit shown in Fig. 3.
[0012] Fig. 1 shows a sub-booster circuit according to one embodiment of this invention
and the peripheral circuits thereof. Power source voltage Vcc (or externally supplied
high voltage Vpp) is stepped up or boosted by means of main booster circuit 11. Stepped-up
voltage Vpu which is obtained by raising power source voltage Vcc or high voltage
Vpp by using main booster circuit 11 is supplied to sub-booster circuit 12 and object
circuit 13 which is operated by the stepped-up voltage. Sub-booster circuit 12 includes
N-channel MOS transistors Q1 and Q2 and MOS capacitor C1. The drain of MOS transistor
Q1 is connected to the output terminal of main booster circuit 11, and the gate thereof
is connected to the output terminal (node N1) of selection circuit 14. The input terminal
of selection circuit 14 is connected to receive selection signals SS1 to SSn for
selecting sub-booster circuit 12. Further, the output terminal of selection circuit
14 is connected to the input terminal of object circuit 13. The source of MOS transistor
Q1 is connected to the drain and gate of MOS transistor Q2 and the source of MOS transistor
Q2 is connected to node N1. A connection node (node N2) between the source of MOS
transistor Q1 and the drain of MOS transistor Q2 is connected to a first electrode
of MOS capacitor C1. A second electrode of MOS capacitor C1 is connected to the output
terminal of clock generation circuit 15 so as to receive clock pulse φc.
[0013] Object circuit 13 includes N-channel MOS transistor Q3. The drain of MOS transistor
Q3 is connected to the output terminal of main booster circuit 11 and the gate thereof
is connected to node N1. Further, the source of MOS transistor Q3 is connected to
an internal circuit which is not shown. In Fig. 1, a parasitic capacitor such as a
wiring capacitor and a gate capacitor is denoted by capacitor C2 which is grounded
at one electrode.
[0014] There will now be described the operation of the circuit with the construction described
above with reference to the timing chart shown in Fig. 2. When an output signal on
the output terminal (node N1) of selection circuit 14 is set to a "1" level, sub-booster
circuit 12 is selected, turning on MOS transistor Q1. As a result of this, potential
V2a at node N2 is raised to a potential level which is lower than potential V1a at
node N1 by threshold voltage V
TH1 of N-channel MOS transistor Q1. An increase in potential V2a at node N2 renders
MOS transistor Q1 nonconductive. Therefore, potential V2a at node N2 set at this time
is given as follows:
V2a = V1a - V
TH1 (1)
[0015] When potential V2a at node N2 is higher than threshold voltage V
THC of MOS capacitor C1, an inverted layer is formed under the gate of MOS capacitor
C1, thus providing a coupling capacitor between the output terminal of clock generation
circuit 15 and node N2. Assume now that the input voltage level of the clock pulse
is Vφ. Then, charge E1a expressed by the following equation (2) is stored in MOS
capacitor C1:
E1a = C1 × (V2a - Vφ) (2)
[0016] At this time, if the level of clock pulse φc is 0 V, charge E1a stored in MOS capacitor
C1 is expressed as follows:
E1a = C1 × V2a = C1 × (V1a - V
TH1 (3)
[0017] In this case, if clock pulse φc with potential Vφ rises, a potential at node N2 is
raised as a result of the capacitive coupling of capacitor C1. When the potential
at node N2 becomes higher than a voltage obtained by adding threshold voltage V
TH2 of N-channel MOS transistor Q2 to potential V1a at node N1, MOS transistor Q2 is
turned on, causing the charge stored in capacitor C1 to be discharged to node N1 via
MOS transistor Q2. Due to the discharge operation, the potential at node N1 rises.
Since, in this case, MOS transistor Q2 is turned off again by a voltage obtained by
adding threshold voltage V
TH2 of MOS transistor Q2 to the potential at node N1, the potential at node N2 is kept
at the potential level which is set up at this time. Therefore, potential V2b at node
N2 is expressed as follows:
V2b = V1b + V
TH2 (4)
[0018] V1b denotes a potential at node N1 after the rise potential has been reached.
[0019] Therefore, charge E1b remaining in capacitor C1 can be expressed as follows:
E1b = C1 × (V2b - Vφ) = C1 × (V1b + V
TH2 - Vφ) (5)
[0020] Further, initial charge E2a in load capacitor C2 at node N1 is expressed as follows:
E2a = C2 × V1a (6)
[0021] Therefore, charge E2b stored in load capacitor C2 after the potential of the rise
at node N1 has been reached can be expressed as follows:
E2b = C2 × V1b (7)
[0022] Since, at this time, total amount E of the charges stored in MOS capacitor C1 and
load capacitor C2 is kept constant before and after the rise of clock pulse φc, it
can be expressed as follows:
E = E1a + E2a = E1b + E2b (8)
[0023] Therefore, the following equation can be obtained:
(C1 × (V1a - V
TH1)} + (C2 × V1a)
= (C1 × (V1b + V
TH2 - Vφ)} + (C2 x V1b) (9)
[0024] From equation (9), potential V1b at node N1 after the potential of the rise has been
reached can be obtained as follows:
V1b = V1a + (Vφ - V
TH1 - V
TH2) × C1/(C1 + C2) (10)
[0025] Thus, potential V1a at node N1 rises by "(Vφ - V
TH1 -
VTH2) × C1/(C1 + C2)".
[0026] Next, when clock pulse φc falls with potential -Vφ, the potential at node N2 starts
to fall due to the capacitive coupling of MOS capacitor C1. However, when a potential
at node N2 becomes lower than a voltage "V2c = V1b - V
TH1", that is, a voltage which is lower than the gate voltage of MOS transistor Q1 or
voltage V1b at node N1 by threshold voltage V
TH1 of MOS transistor Q1, MOS transistor Q1 is turned on, thus restarting the charging
of node N2. Therefore, the potential at node N2 rises to a potential of "V2c = V1b
- V
TH1" which may cause MOS transistor Q1 to be turned off. At this time, since gate voltage
V2c of MOS transistor Q2 is lowered and MOS transistor Q2 is kept in the OFF condition,
potential V1b at node N1 is kept constant.
[0027] From the above description, it is clearly understood that potential V1 at node N1
is raised by an amount determined by "(Vφ - V
TH1 - V
TH2) × C1/(C1 + C2)" each time clock pulse φc rises. Therefore, in order to most efficiently
operate sub-booster circuit 12, care should be taken to satisfy the following conditions
(a) to (d).
(a) The rise time of clock pulse φc should be set to be short.
(b) The value of load capacitor C2 should be set to be small or coupling MOS capacitor
C1 should be set to have a capacitance relatively larger than load capacitor C2 to
make "C1/(C1 + C2)" as close to "1" as possible.
(c) Input voltage level Vφ of clock pulse φc should be set to be high.
(d) Threshold voltages VTH1 and VTH2 of MOS transistors Q1 and Q2 should be set to be low.
[0028] However, in the MOS semiconductor integrated circuit, conditions (a) to (c) are determined
by other factors and it is frequently impossible to satisfy these conditions. In order
to satisfy condition (d), it is necessary to keep MOS transistor Q2 in the nonconductive
state at the time clock pulse φc falls. The cutoff condition of MOS transistor Q2
can be expressed as follows:
V
GS2 - V
TH2 < 0 (11)
[0029] V
GS2 denotes a potential difference between the gate and source of MOS transistor Q2.
[0030] Since gate voltage V
G of MOS transistor Q2 is "V1a - V
TH1" and source voltage V
S is "V1a", expression (11) can be rewritten as follows:
V1a - V
TH1 - V1a - V
TH2 = -V
TH1 - V
TH2 < 0 (12) Since V
TH2 is positive, the following expression can be obtained;
|V
TH1|< V
TH2 (13)
[0031] That is, a booster circuit having a high step-up efficiency can be obtained by satisfying
the condition on the threshold voltage. Further, if condition (d) is satisfied, a
booster circuit capable of supplying a high stepped-up voltage can be designed while
the reduction of the output voltage due to the threshold voltage of MOS transistors
Q and Q2 can be suppressed to a minimum. In the first embodiment, this is achieved
by using an intrinsic MOS transistor having a threshold voltage of substantially 0
V as MOS transistor Q1 and using an enhancement type MOS transistor having a positive
threshold voltage as MOS transistor Q2.
[0032] Fig. 3 shows a sub-booster circuit according to a second embodiment of this invention
and peripheral circuits thereof. Portions in Fig. 3 which correspond to those in
Fig. 1 are denoted by the same reference numerals and the explanations thereof are
therefore omitted. Depletion type N-channel MOS transistor Q4 having a gate grounded
is connected between the output terminal of selection circuit 14 and node N1 of sub-booster
circuit 12. For example, as shown in Fig. 4, sub-booster circuit 14 includes NAND
gate (or NOR gate) 16 and CMOS inverter 17. Input terminals of NAND gate 16 are connected
to receive selection signals SS1 to SSn (which can be replaced by address signals
in the case of memory) which are used to select sub-booster circuit 12. When sub-booster
circuit 12 is selected, an output potential of CMOS inverter 17 is set to a Vcc level
(for example, 5 V), and when sub-booster circuit 12 is not selected, the output potential
is set to 0 V.
[0033] MOS transistor Q4 is turned off when a potential at node N1 is stepped up, thus preventing
the charge from being discharged from node N1. Further, when sub-booster circuit
12 is selected, the potential at node N1 is set to a potential level of (-V
TH4) obtained by subtracting threshold voltage V
TH4 of MOS transistor Q4 from the gate voltage of MOS transistor Q4. When the potential
at node N1 is set to (-V
TH4), MOS transistor Q1 is turned on. Therefore, the potential appearing at node N2 at
this time can be expressed as follows, based on equation (1) ("V2a = V1a - V
TH1):
V2a = -V
TH4 - V
TH1(14)
[0034] In order to attain the voltage step-up operation by means of sub-booster circuit
12, it is necessary to set the potential at node N2 higher than threshold voltage
V
THC of MOS capacitor C1 so as to form an inversion layer under the gate, thus forming
a coupling capacitor. For this reason, it is required that potential V2a at node N2
be set higher than threshold voltage V
THC of MOS capacitor C1 at the time circuit 12 is selected. Since V2a > V
TH1, the following expression can be obtained:
-V
TH4 - V
TH1 > V
THC (15)
[0035] As is clearly seen from equation (15), if threshold voltage V
TH1 of MOS transistor Q1 is set as low as possible, the condition set by expression
(15) can be more easily satisfied, and consequently a large tolerance for variation
in the threshold voltages occurring in the manufacturing process of MOS semiconductor
integrated circuits can be attained.
[0036] In the circuit of Fig. 3, MOS capacitor C1 is formed to have the same structure as
enhancement type MOS transistor Q2 so as to have threshold voltage V
THC of 1 V, for example, MOS transistor Q1 is formed to have threshold voltage V
TH1 of 0 V, and MOS transistor Q4 is formed in the same manner as a depletion type so
as to have threshold voltage V
TH4 of -3 V, for example.
[0037] As described before, it is only required that the circuit of this invention satisfy
the condition set by the expression "|V
TH1| < V
TH2". Therefore, when V
TH2 is set to 1 V, the most efficient step-up operation can be attained by setting V
TH1 to -0.9 V. Since the threshold voltage of MOS capacitor C1 is set to be equal to
that of MOS transistor Q2, V2 is set to 0.9 V when sub-booster circuit 12 is not selected,
that is, at the time of V1 = 0 V. Therefore, in this case, no inversion layer is formed
in MOS capacitor C1, and MOS capacitor can be substantially neglected. At this time,
even if clock pulse φc has varied in level, the potential at node N2 will not change.
[0038] As described above, according to this invention, a sub-booster circuit which can
step up an output voltage of a main booster circuit with a high step-up efficiency
can be provided.
1. A sub-booster circuit for stepping up an output voltage (Vpu) of a main booster
circuit (11) and supplying a stepped-up voltage to an object circuit (13) characterized
by comprising:
first switching means (Q1) having a first end connected to receive the output
voltage (Vpu) of said main booster circuit (11), a control input terminal connected
to an input terminal of said object circuit (13), and a second end; second switching
means (Q2) having a first end and a control terminal connected to the second end of
said first switching means (Q1) and a second end connected to the input terminal
of said object circuit (13); and capacitive means (C1) having a first electrode connected
to a connection node (N2) between said first and second switching means (Q1 and Q2)
and a second electrode connected to receive a clock pulse signal (φc); and characterized
in that a potential for turning on said second switching means (Q2) is larger in its
absolute value than a potential for turning on said first switching means (Q1) and
said capacitive means (C1) functions as a capacitor when a potential at the first
electrode is substantially equal to or higher than the potential for turning on said
second switching means (Q2) and exhibits no capacitance property when the potential
at the first electrode is lower than the potential for turning on said second switching
means (Q2).
2. A sub-booster circuit according to claim 1,
characterized in that said first switching means includes an intrinsic type N-channel
MOS transistor (Q1) and said second switching means includes an enhancement type N-channel
MOS transistor (Q2).
3. A sub-booster circuit according to claim 1,
characterized in that said capacitive means includes a MOS capacitor (C1).
4. A sub-booster circuit according to claim 1,
characterized by further comprising a selection circuit (14) for determining whether
or not an output voltage of said sub-booster circuit (12) has been supplied to said
object circuit (13).
5. A sub-booster circuit according to claim 4,
characterized in that said selection circuit (14) includes a NAND gate (16) connected
to receive selection signals (SS1 to SSn), and a CMOS inverter (17) having an input
terminal connected to receive an output signal of said NAND gate (16) and an output
terminal connected to the input terminal of said object circuit (13).
6. A sub-booster circuit according to claim 4,
characterized in that said selection circuit (14) includes a NAND gate (16) connected
to receive selection signals (SSl to SSn), a CMOS inverter (17) connected to receive
an output signal of said NAND gate (16), and a depletion type MOS transistor (Q4)
having a grounded gate and a current path connected between an output terminal of
said CMOS inverter (17) and the input terminal of said object circuit (13).
7. A sub-booster circuit according to claim 1,
characterized in that said object circuit (13) includes a MOS transistor (Q3) having
a drain connected to the output terminal of said main booster circuit (11) and a gate
connected to the second end of said second switching means (Q2).
8. A sub-booster circuit for stepping up an output voltage (Vpu) of a main booster
circuit (11) and supplying a stepped-up voltage to an object circuit (13) characterized
by comprising:
a first MOS transistor (Q1) having a drain connected to the output terminal
of said main booster circuit (11), and a gate connected to an input terminal of said
object circuit (13); a second MOS transistor (Q2) having a drain and a gate connected
to the source of said first M0S transistor (Q1) and a source connected to the input
terminal of said object circuit (13); and a MOS capacitor (C1) having a first electrode
connected to a connection node (N2) between said first and second MOS transistors
(Q1 and Q2) and a second electrode connected to receive a clock pulse signal (φc);
and characterized in that a threshold voltage of said second MOS transistor (Q2)
is set larger in its absolute value than a threshold voltage of said first MOS transistor
(Q1) and said MOS capacitor (C1) has substantially the same threshold voltage as said
second MOS transistor (Q2).
9. A sub-booster circuit according to claim 8, characterized in that said first MOS
transistor (Q1) is an intrinsic type N-channel MOS transistor and said second MOS
transistor (Q2) is an enhancement type N-channel MOS transistor.
10. A sub-booster circuit according to claim 8,
characterized by further comprising a selection circuit (14) for determining whether
or not an output voltage of said sub-booster circuit (12) has been supplied to said
object circuit (13).
11. A sub-booster circuit according to claim 10, characterized in that said selection
circuit (14) includes a NAND gate (16) connected to receive selection signals (SSl
to SSn), and a CMOS inverter (17) having an input terminal connected to receive an
output signal of said NAND gate (16) and an output terminal connected to the input
terminal of said object circuit (13).
12. A sub-booster circuit according to claim 10,
characterized in that said selection circuit (14) includes a NAND gate (16) connected
to receive selection signals (SSl to SSn), a CMOS inverter (17) connected to receive
an output signal of said NAND gate (16), and a depletion type MOS transistor (Q4)
having a grounded gate and a current path connected between an output terminal of
said CMOS inverter (17) and the input terminal of said object circuit (13).
13. A sub-booster circuit according to claim 8,
characterized in that said object circuit (13) includes a MOS transistor (Q3) having
a drain connected to the output terminal of said main booster circuit (11) and a gate
connected to the source of said second MOS transistor (Q2).
14. A sub-booster circuit for stepping up an output voltage (Vpu) of a main booster
circuit (11) and supplying a stepped-up voltage to an object circuit (13) which is
selected by a selection circuit (14) characterized by comprising:
a first MOS transistor (Q1) having a drain connected to the output terminal
of said main booster circuit (11), and a gate connected to an input terminal of said
object circuit (13); a second MOS transistor (Q2) having a drain and a gate connected
to the source of said first MOS transistor (Q1) and a source connected to the input
terminal of said object circuit (13); a MOS capacitor (C1) having a first electrode
connected to a connection node (N2) between said first and second MOS transistors
(Q1 and Q2) and a second electrode connected to receive a clock pulse signal (φc);
and a third MOS transistor of a depletion type (Q4) having a drain connected to the
input terminal of said object circuit (13), a source connected to the output terminal
of said selection circuit (14) and a grounded gate; and characterized in that a threshold
voltage of said second MOS transistor (Q2) is larger in its absolute value than a
threshold voltage of said first MOS transistor (Q1) and said MOS capacitor (C1) has
substantially the same threshold voltage as said second MOS transistor (Q2).
15. A sub-booster circuit according to claim 14, characterized in that said first
MOS transistor (Q1) is an intrinsic type N-channel MOS transistor and said second
MOS transistor (Q2) is an enhancement type N-channel MOS transistor.
16. A sub-booster circuit according to claim 14, characterized in that said selection
circuit (14) includes a NAND gate (16) connected to receive the selection signals,
and a CMOS inverter (17) having an input terminal connected to receive an output signal
of said NAND gate (16) and an output terminal connected to the input terminal of said
object circuit (13).
17. A sub-booster circuit according to claim 14, characterized in that said object
circuit (13) includes a MOS transistor (Q3) having a drain connected to the output
terminal of said main booster circuit (11) and a gate connected to the source of said
second MOS transistor (Q2).