PROCESS FOR DEPOSITING LAYERS OF DIAMOND - Patent 0288526

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EP 0 288 526 A1

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(43)	Date of publication:
	02.11.1988 Bulletin 1988/44

(21)	Application number: 87907264.0

(22)	Date of filing: 08.09.1987

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International Patent Classification (IPC):

C30B 29/ 04^{( . )}
C01B 31/ 06^{( . )}
C30B 25/ 02^{( . )}

B23P 15/ 28^{( . )}
C23C 16/ 27^{( . )}

(86)	International application number:
	PCT/US1987/002251

(87)	International publication number:
	WO 1988/002792 (21.04.1988 Gazette 1988/09)

(84)	Designated Contracting States:
	DE FR GB IT

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Priority:

15.10.1986 US 19860919102

(71)	Applicant: Hughes Aircraft Company
	Los Angeles California 90045-0066 (US)

(72)	Inventor:
	PASTOR, Ricardo, C. Manhattan Beach, CA 90266 (US)

(74)	Representative: KUHNEN, WACKER & PARTNER
	Patent- und Rechtsanwaltsbüro, Alois-Steineckerstrasse 22 D-85354 Freising D-85354 Freising (DE)

(54)	PROCESS FOR DEPOSITING LAYERS OF DIAMOND