MULTILAYER RESIST STRUCTURE - Patent 0289595

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(11)

EP 0 289 595 A1

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(43)	Date of publication:
	09.11.1988 Bulletin 1988/45

(21)	Application number: 88900613.0

(22)	Date of filing: 13.10.1987

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International Patent Classification (IPC):

G03F 7/ 11^{( . )}
H01L 21/ 00^{( . )}
H01L 21/ 302^{( . )}
H01L 21/ 311^{( . )}

G03F 7/ 09^{( . )}
H01L 21/ 027^{( . )}
H01L 21/ 3065^{( . )}
H01L 21/ 312^{( . )}

(86)	International application number:
	PCT/US1987/002611

(87)	International publication number:
	WO 1988/003703 (19.05.1988 Gazette 1988/11)

(84)	Designated Contracting States:
	DE FR GB IT NL

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Priority:

12.11.1986 US 19860929683

(71)	Applicant: HUGHES AIRCRAFT COMPANY
	Los Angeles, California 90502 (US)

(72)	Inventors:
	HENDERSON, Richard, C. Westlake Village, CA 91361 (US) GARVIN, Hugh, L. Malibu, CA 90265 (US) BEAUBIEN, Randall, S. Westlake Village, CA 91361 (US) RENSCH, David, B. Thousand Oaks, CA 91320 (US)

(74)	Representative: KUHNEN, WACKER & PARTNER
	Patent- und Rechtsanwaltsbüro, Alois-Steineckerstrasse 22 D-85354 Freising D-85354 Freising (DE)

(54)	MULTILAYER RESIST STRUCTURE