(19)
(11) EP 0 295 272 A1

(12)

(43) Date of publication:
21.12.1988 Bulletin 1988/51

(21) Application number: 87907809.0

(22) Date of filing: 04.12.1987
(51) International Patent Classification (IPC): 
C01B 31/ 36( . )
C23C 16/ 32( . )
C30B 29/ 36( . )
H01L 33/ 00( . )
C23C 16/ 02( . )
C30B 25/ 02( . )
H01L 21/ 205( . )
(86) International application number:
PCT/GB1987/000880
(87) International publication number:
WO 1988/004333 (16.06.1988 Gazette 1988/13)
(84) Designated Contracting States:
CH DE FR GB IT LI NL SE

(30) Priority: 10.12.1986 GB 19860029496

(71) Applicant: The British Petroleum Company p.l.c.
London EC2Y 9BU (GB)

(72) Inventor:
  • THWAITES, Michael, John
    Near Basingstoke Hampshire (GB)

(74) Representative: Ryan, Edward Terrence, et al 
BP INTERNATIONAL LIMITED, Patents Division Chertsey Road
Sunbury-on-Thames Middlesex, TW16 7LN
Sunbury-on-Thames Middlesex, TW16 7LN (GB)

   


(54) PRODUCTION OF SILICON CARBIDE