(84) |
Designated Contracting States: |
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DE FR GB |
(30) |
Priority: |
15.06.1987 JP 148373/87 25.08.1987 JP 211124/87 25.08.1987 JP 129073/87 29.08.1987 JP 132128/87
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(71) |
Applicant: Dainippon Screen Mfg. Co., Ltd. |
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Kamikyo-ku
Kyoto 602 (JP) |
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(72) |
Inventors: |
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- Oda, Osamu
c/o Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
- Mizuta, Masaji
c/o Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
- Tsuchimoto, Shuji
Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
- Okuda, Hideharu
Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
- Nakajima, Masahiro
Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
- Sumi, Kenji
c/o Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
- Kadota, Tomoyuki
Dainippon Screen Mfg. Co., Ltd.
Kuze
Minami-ku
Kyoto (JP)
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(74) |
Representative: Goddar, Heinz J., Dr. et al |
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FORRESTER & BOEHMERT
Franz-Joseph-Strasse 38 80801 München 80801 München (DE) |
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