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(11)

EP 0 299 081 A1

(12)

(43) Date of publication: 18.01.1989 Bulletin 1989/03 (21) Application number: 88901103.0 (22) Date of filing: 25.01.1988

(51) International Patent Classification (IPC):  C04B 35/ 45( . ) H01L 39/ 24( . ) H01L 39/ 12( . ) (86) International application number: PCT/JP1988/000050 (87) International publication number: WO 1988/005604 (28.07.1988 Gazette 1988/17)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 27.01.1987 JP 19870017013 20.02.1987 JP 19870038873 05.03.1987 JP 19870050954 11.06.1987 JP 19880001459 30.06.1987 JP 19870163669 (71) Applicant: JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY Tokyo 100 (JP)	(72) Inventors: IHARA, Hideo Tukuba-shi Ibaraki 305 (JP) HIRABAYASHI, Masayuki Tukuba-shi Ibaraki 305 (JP) TERADA, Norio Tukuba-shi Ibaraki 305 (JP) (74) Representative: Wagner, Karl H., et al  WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5 D-80538 München D-80538 München (DE)