(19)
(11) EP 0 301 505 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
23.11.1989 Bulletin 1989/47

(43) Date of publication A2:
01.02.1989 Bulletin 1989/05

(21) Application number: 88112131.3

(22) Date of filing: 27.07.1988
(51) International Patent Classification (IPC)4: H01J 37/20
(84) Designated Contracting States:
DE GB NL

(30) Priority: 28.07.1987 JP 186568/87

(71) Applicant: HITACHI, LTD.
Chiyoda-ku, Tokyo 101 (JP)

(72) Inventors:
  • Yokoto, Takashi
    Shinjyou-shi Yamagata-ken (JP)
  • Isakozawa, Shigeto
    Katsuta-shi Ibaraki-ken (JP)

(74) Representative: Altenburg, Udo, Dipl.-Phys. et al
Patent- und Rechtsanwälte, Bardehle . Pagenberg . Dost . Altenburg . Frohwitter . Geissler & Partner, Galileiplatz 1
81679 München
81679 München (DE)


(56) References cited: : 
   
       


    (54) Sample tilting device in electron microscope


    (57) Disclosure is given for a sample tilting device for use in an electron microscope, wherein a first cylinder (7) is arranged in the lateral direction with respect to the electron beam axis to be capable of making conical motion around a fixed point of a microscope tube and rotary motion of the axis of its own, a sample support (8) supporting a sample (20) at the fore end is supported by the first cylinder to position the sample on the electron beam axis, a second cylinder (11) accommodating the rear end part of the first cylinder is movably fitted rotatably to the microscope tube, a pair of shafts is fitted to the second cylinder so that the fore ends thereof engage with the rear end part of the first cylinder and so that they move forward and backward in the radial direction of the second cylinder, and a motor is mounted on the second cylinder so as to drive at least one of the shafts for the movement thereof.







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