(19)

(11)

EP 0 315 678 A1

(12)

(43) Date of publication: 17.05.1989 Bulletin 1989/20 (21) Application number: 88905319.0 (22) Date of filing: 26.05.1988

(51) International Patent Classification (IPC):  C23C 14/ 04( . ) C30B 33/ 00( . ) C23C 14/ 54( . ) H01L 21/ 68( . ) (86) International application number: PCT/US1988/001810 (87) International publication number: WO 1988/009223 (01.12.1988 Gazette 1988/26)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 27.05.1987 US 19870054555 (71) Applicant: EMKAY MANUFACTURING COMPANY East Hannover, NJ 07936 (US)	(72) Inventors: KAPLAN, Alan, S. West Orange, NJ 07052 (US) ROBERTSON, Samuel, E. Denville, NJ 07843 (US) MASKREY, Alfred, E. Pittsburgh, PA 15239 (US) MATTEO, Augustino, Jr. Watchung, NJ 07060 (US) (74) Representative: Gillam, Francis Cyril, et al  SANDERSON & CO. European Patent Attorneys 34, East Stockwell Street Colchester Essex CO1 1ST Colchester Essex CO1 1ST (GB)