POSITIONING APPARATUS PARTICULARLY FOR USE IN A VACUUM ENVIRONMENT

(19)

(11)

EP 0 316 396 A1

(12)

(43)	Date of publication:
	24.05.1989 Bulletin 1989/21

(21)	Application number: 88904596.0

(22)	Date of filing: 03.06.1988

(51)

International Patent Classification (IPC):

G12B 5/ 00^{( . )}
B23Q 5/ 34^{( . )}
G02B 7/ 00^{( . )}
G03F 9/ 00^{( . )}
H01L 21/ 30^{( . )}
H01L 41/ 09^{( . )}

B23Q 1/ 36^{( . )}
G01J 3/ 06^{( . )}
G03F 7/ 20^{( . )}
G05D 3/ 00^{( . )}
H01L 21/ 68^{( . )}

(86)	International application number:
	PCT/GB1988/000433

(87)	International publication number:
	WO 1988/009945 (15.12.1988 Gazette 1988/27)

(84)	Designated Contracting States:
	CH DE FR GB IT LI SE

(30)

Priority:

04.06.1987 GB 19870013050

(71)	Applicant: Renishaw plc
	Wotton-Under-Edge Gloucestershire GL12 8JR (GB)

(72)	Inventors:
	TUCKER, Philip, Martin Gloucestershire GL12 7EP (GB) HAYDEN, Brian, Elliott Upper Shirley Southampton (GB)

(74)	Representative: Waite, John, et al
	Renishaw plc Patent Department New Mills Wotton-Under-Edge Gloucestershire GL12 8JR Wotton-Under-Edge Gloucestershire GL12 8JR (GB)

(54)	POSITIONING APPARATUS PARTICULARLY FOR USE IN A VACUUM ENVIRONMENT