(19)
(11)
EP 0 316 401 A1
(12)
(43)
Date of publication:
24.05.1989
Bulletin 1989/21
(21)
Application number:
88904747.0
(22)
Date of filing:
25.03.1988
(51)
International Patent Classification (IPC):
H01L
29/
762
( . )
H01L
29/
10
( . )
H01L
21/
339
( . )
(86)
International application number:
PCT/US1988/000938
(87)
International publication number:
WO 1988/009059
(
17.11.1988
Gazette 1988/25)
(84)
Designated Contracting States:
CH DE FR GB LI
(30)
Priority:
05.05.1987
US 19870046019
(71)
Applicant:
HUGHES AIRCRAFT COMPANY
Los Angeles, CA 90080-0028 (US)
(72)
Inventors:
CLARK, William, M., Jr.
Thousand Oaks, CA 91360 (US)
WALDEN, Robert, H.
Westlake Village, CA 91361 (US)
UTLAUT, Mark, W.
Saugus, CA 91350 (US)
(74)
Representative:
KUHNEN, WACKER & PARTNER
Patent- und Rechtsanwaltsbüro, Alois-Steineckerstrasse 22
D-85354 Freising
D-85354 Freising (DE)
(54)
CHARGE-COUPLED DEVICE WITH FOCUSED ION BEAM FABRICATION