(19)
(11) EP 0 316 401 A1

(12)

(43) Date of publication:
24.05.1989 Bulletin 1989/21

(21) Application number: 88904747.0

(22) Date of filing: 25.03.1988
(51) International Patent Classification (IPC): 
H01L 29/ 762( . )
H01L 29/ 10( . )
H01L 21/ 339( . )
(86) International application number:
PCT/US1988/000938
(87) International publication number:
WO 1988/009059 (17.11.1988 Gazette 1988/25)
(84) Designated Contracting States:
CH DE FR GB LI

(30) Priority: 05.05.1987 US 19870046019

(71) Applicant: HUGHES AIRCRAFT COMPANY
Los Angeles, CA 90080-0028 (US)

(72) Inventors:
  • CLARK, William, M., Jr.
    Thousand Oaks, CA 91360 (US)
  • WALDEN, Robert, H.
    Westlake Village, CA 91361 (US)
  • UTLAUT, Mark, W.
    Saugus, CA 91350 (US)

(74) Representative: KUHNEN, WACKER & PARTNER 
Patent- und Rechtsanwaltsbüro, Alois-Steineckerstrasse 22
D-85354 Freising
D-85354 Freising (DE)

   


(54) CHARGE-COUPLED DEVICE WITH FOCUSED ION BEAM FABRICATION