CHARGE-COUPLED DEVICE WITH FOCUSED ION BEAM FABRICATION - Patent 0316401

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EP 0 316 401 A1

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(43)	Date of publication:
	24.05.1989 Bulletin 1989/21

(21)	Application number: 88904747.0

(22)	Date of filing: 25.03.1988

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International Patent Classification (IPC):

H01L 29/ 762^{( . )}
H01L 29/ 10^{( . )}

H01L 21/ 339^{( . )}

(86)	International application number:
	PCT/US1988/000938

(87)	International publication number:
	WO 1988/009059 (17.11.1988 Gazette 1988/25)

(84)	Designated Contracting States:
	CH DE FR GB LI

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Priority:

05.05.1987 US 19870046019

(71)	Applicant: HUGHES AIRCRAFT COMPANY
	Los Angeles, CA 90080-0028 (US)

(72)	Inventors:
	CLARK, William, M., Jr. Thousand Oaks, CA 91360 (US) WALDEN, Robert, H. Westlake Village, CA 91361 (US) UTLAUT, Mark, W. Saugus, CA 91350 (US)

(74)	Representative: KUHNEN, WACKER & PARTNER
	Patent- und Rechtsanwaltsbüro, Alois-Steineckerstrasse 22 D-85354 Freising D-85354 Freising (DE)

(54)	CHARGE-COUPLED DEVICE WITH FOCUSED ION BEAM FABRICATION