Horizontal laminar air flow work station

(19)

(11)

EP 0 319 145 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	29.05.1991 Bulletin 1991/22

(43)	Date of publication A2:
	07.06.1989 Bulletin 1989/23

(21)	Application number: 88310431.7

(22)	Date of filing: 07.11.1988

(51)	International Patent Classification (IPC)⁴: F24F 3/16

(84)	Designated Contracting States:
	DE FR GB NL

(30)

Priority:

01.12.1987 US 126656

(71)	Applicant: VARIAN ASSOCIATES, INC.
	Palo Alto, CA 94303 (US)

(72)	Inventors:
	Mears, Eric Loring Rockport, MA (US) Jennings, Robert E. Andover, MA 01810 (US)

(74)	Representative: Cline, Roger Ledlie et al
	EDWARD EVANS & CO. Chancery House 53-64 Chancery Lane London WC2A 1SD London WC2A 1SD (GB)

(56)

References cited: :

(54)	Horizontal laminar air flow work station

(57) A load chamber (6) of a load lock is provided with a vertical air curtain which isolates the load chamber (6) from the general clean room environment. Horizontal air flows generated in the load chamber (6) bathe wafers (W) held horizontally in the chamber with filtered air. These horizontal air flows are captured by the air curtain and recirculated to filters (26b,28b) which provide horizontal and vertical air flows in the load chamber (6). If desired, the vertical and horizontal flows may be driven by the air supply mechanism of the clean room itself.

Search report