(19)
(11) EP 0 321 792 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
20.03.1991 Bulletin 1991/12

(43) Date of publication A2:
28.06.1989 Bulletin 1989/26

(21) Application number: 88120527.2

(22) Date of filing: 08.12.1988
(51) International Patent Classification (IPC)4H01J 65/04, H01J 23/20, H01J 25/12
(84) Designated Contracting States:
DE FR GB

(30) Priority: 23.12.1987 US 137304

(71) Applicant: Hewlett-Packard Company
Palo Alto, California 94304 (US)

(72) Inventor:
  • Sullivan, James J.
    Newark, DE 19711 (US)

(74) Representative: Liesegang, Roland, Dr.-Ing. et al
FORRESTER & BOEHMERT Franz-Joseph-Strasse 38
80801 München
80801 München (DE)


(56) References cited: : 
   
       


    (54) Microwave resonant cavity


    (57) A microwave resonant cavity (10) for a spectroscopic light source includes a housing (12) having therein a chamber (26) formed by side walls (14,16) and a cylindrical outer wall (18). The side walls having aligned openings (22,24) therethrough which are on the longitudinal axis of the outer wall (18). A refractory tube (34) which is adapted to contain a gaseous plasma extends through the aligned openings (22,24) and across the chamber (26) in the housing. The portion of the side walls (14,16) of the chamber (26) adjacent the openings (22,24) are closer together than the remaining portions of the side walls (14,16) so that the chamber (26) has a first portion (30) around the refractory tube (34) which is narrower than a second portion (32) of the chamber around the first portion. A coupling loop is electrically coupled to a side wall (16) of the chamber (26) within the second portion (32) of the chamber (26) and is connected to a coaxial connector (67,70) which extends through the outer wall (18) of the housing (12) to deliver microwave power to the chamber (26). This provides a resonant cavity (10) in which the plasma formed in the refractory tube (34) is very short for increased power and greater brightness of the plasma. This also provides a resonant cavity which requires no tuning and is more stable.







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