(19)

(11)

EP 0 322 443 A1

(12)

(43) Date of publication: 05.07.1989 Bulletin 1989/27 (21) Application number: 88906480.0 (22) Date of filing: 29.06.1988

(51) International Patent Classification (IPC):  C30B 31/ 10( . ) H01L 21/ 673( . ) (86) International application number: PCT/US1988/002188 (87) International publication number: WO 1989/000333 (12.01.1989 Gazette 1989/02)

(84) Designated Contracting States: DE FR GB IT NL (30) Priority: 02.07.1987 US 19870069699 (71) Applicant: FLUOROWARE, INC. Chaska, MN 55318 (US)	(72) Inventor: QUERNEMOEN, Daniel, R. Chaska, MN 55318 (US) (74) Representative: Simonnot, Bernard, et al  Cabinet Simonnot 35 rue de Clichy F-75442 Paris Cédex 09 F-75442 Paris Cédex 09 (FR)