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(11) | EP 0 324 435 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Non-contacting method of cleaning surfaces with a planar gas bearing |
(57) A non-contact method of cleaning a surface comprising forming a thin gas film (10)
of high velocity gas between a surface (14) to be cleaned and a cleaning device (16).
The gas film (10), being also a gas bearing, supports the cleaning device (16) and
thus forms a self-regulating gap (G) between the surface (14) and the cleaning device
(16) so that the cleaning device (16) never contacts the surface (14). The cleaning
device (16) comprises a plurality of bores (22) for directing gas onto the surface
(14) and an opening (24) for vacuum. In the preferred embodiment, the bores (22) are
arranged in a circle and the opening (24) is located centrally of the circle. The
thickness of the gas film (10) is determined by the pressure of the incoming gas and
vacuum. The creation of turbulence and eddy currents and the use of an ionized gas
are enhancements to the cleaning ability of the gas film (10). The method includes
moving the cleaning device (16) relative to the surface (14) and vice versa. |