(19)
(11) EP 0 324 435 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
31.10.1990 Bulletin 1990/44

(43) Date of publication A2:
19.07.1989 Bulletin 1989/29

(21) Application number: 89100346.9

(22) Date of filing: 10.01.1989
(51) International Patent Classification (IPC)4B08B 5/00, H01L 21/00, G03G 21/00
(84) Designated Contracting States:
DE FR GB IT NL

(30) Priority: 11.01.1988 US 142173

(71) Applicant: Etec Systems, Inc.
Hayward, CA 94545 (US)

(72) Inventors:
  • Dean, Robert L.
    Castro Valley, CA 94552 (US)
  • Young, Lydia J.
    Palo Alto, CA 94303 (US)
  • Veneklasen, Lee H.
    Castro Valley, CA 94546 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)


(56) References cited: : 
   
       


    (54) Non-contacting method of cleaning surfaces with a planar gas bearing


    (57) A non-contact method of cleaning a surface comprising forming a thin gas film (10) of high velocity gas between a surface (14) to be cleaned and a cleaning device (16). The gas film (10), being also a gas bearing, supports the cleaning device (16) and thus forms a self-regulating gap (G) between the surface (14) and the cleaning device (16) so that the cleaning device (16) never contacts the surface (14). The cleaning device (16) comprises a plurality of bores (22) for directing gas onto the surface (14) and an opening (24) for vacuum. In the preferred embodiment, the bores (22) are arranged in a circle and the opening (24) is located centrally of the circle. The thickness of the gas film (10) is determined by the pressure of the incoming gas and vacuum. The creation of turbulence and eddy currents and the use of an ionized gas are enhancements to the cleaning ability of the gas film (10). The method includes moving the cleaning device (16) relative to the surface (14) and vice versa.







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