(19)
(11) EP 0 326 549 A1

(12)

(43) Date of publication:
09.08.1989 Bulletin 1989/32

(21) Application number: 87905246.0

(22) Date of filing: 17.08.1987
(51) International Patent Classification (IPC): 
H01L 21/ 76( . )
H01L 21/ 762( . )
 H01L 21/ 316( . )
(86) International application number:
PCT/GB1987/000575
(87) International publication number:
WO 1989/001702 (23.02.1989 Gazette 1989/05)
(84) Designated Contracting States:
DE FR IT NL

(71) Applicant: PLESSEY OVERSEAS LIMITED
Ilford Essex IG1 4AQ (GB)

(72) Inventor:
  • DUNCAN, Shane
    Northampton (GB)

(74) Representative: Field, Howard John 
THE PLESSEY COMPANY plc Intellectual Property Department Vicarage Lane
Ilford Essex IG1 4AQ
Ilford Essex IG1 4AQ (GB)

   


(54) A LOCAL OXIDATION OF SILICON PROCESS