(19)

(11)

EP 0 328 581 A1

(12)

(43) Date of publication: 23.08.1989 Bulletin 1989/34 (21) Application number: 88906561.0 (22) Date of filing: 11.07.1988

(51) International Patent Classification (IPC):  B25J 9/ 10( . ) B25J 19/ 00( . ) G05B 19/ 414( . ) G12B 5/ 00( . ) B23Q 1/ 25( . ) G01N 35/ 10( . ) G05D 3/ 00( . ) (86) International application number: PCT/US1988/002273 (87) International publication number: WO 1989/000725 (26.01.1989 Gazette 1989/03)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 16.07.1987 US 19870074531 (71) Applicant: CAVRO SCIENTIFIC INSTRUMENTS, INC. Sunnyvale California 94086 (US)	(72) Inventors: LAINE, Donald, D. San Carlos, CA 94070 (US) ROCHTE, Jerry, E. Los Altos, CA 94022 (US) WOLCOTT, Frederick, C. Los Altos, CA 94022 (US) (74) Representative: Wayte, Dennis Travers, et al  BOULT, WADE & TENNANT 27 Furnival Street London, EC4A 1PQ London, EC4A 1PQ (GB)