(84) |
Designated Contracting States: |
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AT BE CH DE FR GB IT LI LU NL SE |
(30) |
Priority: |
02.10.1987 US 19870103979
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(71) |
Applicant: MICROPROBE CORPORATION |
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Bothell, WA 98021 (US) |
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(72) |
Inventors: |
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- SCHWARTZ, Dennis, E.
Redmond, WA 98053 (US)
- ADAMS, Trevor, H.
Woodinville, WA 98072 (US)
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(74) |
Representative: Dipl.-Phys.Dr. Manitz Dipl.-Ing. Finsterwald Dipl.-Ing. Grämkow Dipl.Chem.Dr. Heyn
Dipl.Phys. Rotermund Morgan, B.Sc.(Phys.) |
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Postfach 22 16 11 D-80506 München D-80506 München (DE) |
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