(19)
(11) EP 0 364 536 A1

(12)

(43) Date of publication:
25.04.1990 Bulletin 1990/17

(21) Application number: 89903601.0

(22) Date of filing: 14.03.1989
(51) International Patent Classification (IPC): 
G01R 31/ 26( . )
H01L 21/ 60( . )
H01L 23/ 495( . )
G01R 31/ 28( . )
H01L 21/ 66( . )
H01L 23/ 58( . )
(86) International application number:
PCT/US1989/000965
(87) International publication number:
WO 1989/009493 (05.10.1989 Gazette 1989/24)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 28.03.1988 US 19880173094

(71) Applicant: DIGITAL EQUIPMENT CORPORATION
Maynard, MA 01754 (US)

(72) Inventor:
  • CHASE, Richard, A.
    Boyston, MA 01505 (US)

(74) Representative: Goodman, Christopher, et al 
Eric Potter & Clarkson St. Mary's Court St. Mary's Gate
Nottingham NG1 1LE
Nottingham NG1 1LE (GB)

   


(54) BURN-IN PADS FOR TAB INTERCONNECT STRUCTURES