(19)
(11)
EP 0 364 536 A1
(12)
(43)
Date of publication:
25.04.1990
Bulletin 1990/17
(21)
Application number:
89903601.0
(22)
Date of filing:
14.03.1989
(51)
International Patent Classification (IPC):
G01R
31/
26
( . )
H01L
21/
60
( . )
H01L
23/
495
( . )
G01R
31/
28
( . )
H01L
21/
66
( . )
H01L
23/
58
( . )
(86)
International application number:
PCT/US1989/000965
(87)
International publication number:
WO 1989/009493
(
05.10.1989
Gazette 1989/24)
(84)
Designated Contracting States:
DE FR GB
(30)
Priority:
28.03.1988
US 19880173094
(71)
Applicant:
DIGITAL EQUIPMENT CORPORATION
Maynard, MA 01754 (US)
(72)
Inventor:
CHASE, Richard, A.
Boyston, MA 01505 (US)
(74)
Representative:
Goodman, Christopher, et al
Eric Potter & Clarkson St. Mary's Court St. Mary's Gate
Nottingham NG1 1LE
Nottingham NG1 1LE (GB)
(54)
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