(19)
(11)
EP 0 375 716 A1
(12)
(43)
Date of publication:
04.07.1990
Bulletin 1990/27
(21)
Application number:
88907429.0
(22)
Date of filing:
12.08.1988
(51)
International Patent Classification (IPC):
G01N
35/
00
( . )
H01J
37/
20
( . )
H01J
37/
02
( . )
(86)
International application number:
PCT/SE1988/000407
(87)
International publication number:
WO 1989/001698
(
23.02.1989
Gazette 1989/05)
(84)
Designated Contracting States:
AT BE CH DE FR GB IT LI LU NL SE
(30)
Priority:
21.08.1987
SE 19870003250
(71)
Applicants:
ANDERSSON, Jan Peter
S-133 00 Saltsjöbaden (SE)
NYBOM, Rolf
S-161 55 Bromma (SE)
(72)
Inventors:
ANDERSSON, Jan Peter
S-133 00 Saltsjöbaden (SE)
NYBOM, Rolf
S-161 55 Bromma (SE)
(74)
Representative:
Ström, Tore, et al
Ström & Gulliksson AB Studentgatan 1 P.O. Box 4188
S-203 13 Malmö
S-203 13 Malmö (SE)
(54)
ELECTRODE FOR USE IN A SCANNING ELECTRON MICROSCOPE