SOFT-BAKE TREATMENT OF PHOTORESISTS - Patent 0389593

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EP 0 389 593 A1

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(43)	Date of publication:
	03.10.1990 Bulletin 1990/40

(21)	Application number: 89910018.0

(22)	Date of filing: 18.08.1989

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International Patent Classification (IPC):

G03F 7/ 38^{( . )}
G03F 7/ 16^{( . )}

G03F 7/ 004^{( . )}
H01L 21/ 027^{( . )}

(86)	International application number:
	PCT/US1989/003524

(87)	International publication number:
	WO 1990/003597 (05.04.1990 Gazette 1990/08)

(84)	Designated Contracting States:
	DE FR GB IT NL

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Priority:

30.09.1988 US 19880252269

(71)	Applicant: MACDERMID, INCORPORATED
	Waterbury, CT 06720 (US)

(72)	Inventors:
	JOHN, J., Grunwald 52 100 Ramat Gan (IL) GAL, Chava 45 930 Ramot Ha-Shavim (IL) ARONHIME, Marc, T. 91 999 Jerusalem (IL)

(74)	Representative: Pendlebury, Anthony, et al
	PAGE, WHITE & FARRER 54 Doughty Street London WC1N 2LS London WC1N 2LS (GB)

(54)	SOFT-BAKE TREATMENT OF PHOTORESISTS