......DE....FRGB..IT....NL..........................................................................*EPregister to ST.36 EBD process v 1.0 kbaumeister@epo.org (15 Jan 2013)0389593A119901003EP89910018.01989081819900522enenen1988025226919880930US1990100319904019901003199040G03F 7/ 38 A I G03F 7/ 004 A I G03F 7/ 16 A I H01L 21/ 027 A I enSOFT-BAKE TREATMENT OF PHOTORESISTSfrTRAITEMENT DE CUISSON DOUCE DES PHOTORESERVESdeSCHWACHE BACKBEHANDLUNG VON PHOTOWIDERSTANDSMITTELNMACDERMID, INCORPORATED50 Brookside RoadWaterbury, CT 06720USJOHN, J., Grunwald4 Hameshorer Street52 100 Ramat GanILGAL, ChavaHa'alonim Street45 930 Ramot Ha-ShavimILARONHIME, Marc, T.5/22 Ben Tabbai Street91 999 JerusalemILPendlebury, Anthony, et alPAGE, WHITE & FARRER 54 Doughty StreetLondon WC1N 2LSGBDEFRGBITNLUS198900352419890818enWO199000359719900405199008