TEMPERATURE CONTROLLED DISTRIBUTOR BEAM FOR CHEMICAL VAPOR DEPOSITION - Patent 0391996

(19)

(11)

EP 0 391 996 A1

(12)

(43)	Date of publication:
	17.10.1990 Bulletin 1990/42

(21)	Application number: 89910701.0

(22)	Date of filing: 12.09.1989

(51)

International Patent Classification (IPC):

C03C 17/ 245^{( . )}
C23C 16/ 44^{( . )}
C23C 16/ 46^{( . )}

C03C 17/ 00^{( . )}
C23C 16/ 453^{( . )}
C23C 16/ 52^{( . )}

(86)	International application number:
	PCT/US1989/003939

(87)	International publication number:
	WO 1990/002826 (22.03.1990 Gazette 1990/07)

(84)	Designated Contracting States:
	AT BE CH DE FR GB IT LI LU NL SE

(30)

Priority:

16.09.1988 US 19880245444

(71)	Applicant: LIBBEY-OWENS-FORD CO.
	Toledo, OH 43695 (US)

(72)	Inventors:
	GREENBERG, William, M. Oregon, OH 43616 (US) BAUMAN, Randall, L. Perrysburg, OH 43551 (US)

(74)	Representative: Hands, Horace Geoffrey, et al
	LEWIS W. GOOLD & CO. Whitehall Chambers 23, Colmore Row Birmingham B3 2BL Birmingham B3 2BL (GB)

(54)	TEMPERATURE CONTROLLED DISTRIBUTOR BEAM FOR CHEMICAL VAPOR DEPOSITION