(19)
(11) EP 0 396 583 A1

(12)

(43) Date of publication:
14.11.1990 Bulletin 1990/46

(21) Application number: 89900284.0

(22) Date of filing: 05.12.1988
(51) International Patent Classification (IPC): 
C23C 14/ 04( . )
C23C 14/ 08( . )
C23C 14/ 06( . )
H05K 3/ 10( . )
(86) International application number:
PCT/GB1988/001060
(87) International publication number:
WO 1989/005361 (15.06.1989 Gazette 1989/13)
(84) Designated Contracting States:
AT BE CH DE FR GB IT LI LU NL SE

(30) Priority: 04.12.1987 GB 19870028399

(71) Applicant: NATIONAL RESEARCH DEVELOPMENT CORPORATION
London SE1 6BU (GB)

(72) Inventor:
  • TALIM, Sunil, Pandharinath
    East Molesey Surrey KT8 9TQ (GB)

(74) Representative: Beckham, Robert William, et al 
Defence Evaluation and Research Agency Intellectual Property Department R69 Building DERA Farnborough
Farnborough, Hants. GU14 6TD
Farnborough, Hants. GU14 6TD (GB)

   


(54) DEPOSITION OF MATERIALS IN A DESIRED PATTERN ON TO SUBSTRATES