(19)
(11) EP 0 417 851 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
25.09.1991 Bulletin 1991/39

(43) Date of publication A2:
20.03.1991 Bulletin 1991/12

(21) Application number: 90202392.8

(22) Date of filing: 10.09.1990
(51) International Patent Classification (IPC)5H01L 21/78
(84) Designated Contracting States:
DE FR GB IT

(30) Priority: 15.09.1989 GB 8920964

(71) Applicants:
  • PHILIPS ELECTRONICS UK LIMITED
    Croydon CR9 3QR (GB)

    GB 
  • Philips Electronics N.V.
    5621 BA Eindhoven (NL)

    DE FR IT 

(72) Inventor:
  • Shannon, John Martin
    Redhill, Surrey, RH1 5HA (GB)

(74) Representative: Williamson, Paul Lewis et al
Philips Electronics UK Limited Patents and Trade Marks Department Cross Oak Lane
Redhill, Surrey RH1 5HA
Redhill, Surrey RH1 5HA (GB)


(56) References cited: : 
   
       


    (54) Two-terminal non-linear devices and their method of fabrication


    (57) A method of fabricating small sized, physically discrete, two-terminal non-linear devices in bulk comprising forming on the surface of a temporary support (10;24) a multiple layer formation consisting of a series of thin film layers (12,14,16; 25,26,27,28) of selected materials and uniform thicknesses constituting a diode structure, for example a MIM type or p-n-p punch-through type structure, scribing the multiple layer formation in a regular pattern to define portions, (20;30), and thereafter removing the support and separating the portions into physically discrete elements, each of which forms an individual non-linear device. Large numbers of devices, typically around 20µm across, are produced simultaneously each exhibiting substantially identical physical and electrical properties.







    Search report