(19)
(11) EP 0 420 172 A1

(12) EUROPEAN PATENT APPLICATION

(43) Date of publication:
03.04.1991 Bulletin 1991/14

(21) Application number: 90118451.5

(22) Date of filing: 26.09.1990
(51) International Patent Classification (IPC)5G01P 3/36, G01P 3/80, G01P 3/68
(84) Designated Contracting States:
AT BE CH DE DK ES FR GB GR IT LI NL SE

(30) Priority: 26.09.1989 JP 250366/89

(71) Applicant: OMRON CORPORATION
Kyoto 616 (JP)

(72) Inventors:
  • Miyazaki, Hidenori, Omron Corporation
    Shimokaiinji Nagaokakyo-shi, Kyoto 617 (JP)
  • Kitajima, Hiroshi, Omron Corporation
    Shimokaiinji Nagaokakyo-shi, Kyoto 617 (JP)
  • Yamashita, Tsukasa, Omron Corporation
    Shimokaiinji Nagaokakyo-shi, Kyoto 617 (JP)

(74) Representative: WILHELMS, KILIAN & PARTNER Patentanwälte 
Eduard-Schmid-Strasse 2
81541 München
81541 München (DE)


(56) References cited: : 
   
       


    (54) Speckle velocity sensor


    (57) The invention relates to a speckle speed sensor using either the balance correlation speed measurement method or the zero cross speed measuring method. The speckle speed sensor comprises at least one light-receiving means (8, 9) for reception of a speckle pattern produced by projection of a laser beam on a moving object (7). The light-receiving means (8, 9) uses a light reception aperture (20) elongated in a direction perpendicular to the direction of movement (5) of the speckle pattern. The elongated aperture configuration is conducive to a diminished measurement error.




    Description

    FIELD OF THE INVENTION



    [0001] The present invention relates a speckle sensor adapted to receive a random interference pattern (hereinafter referred to as "speckle pattern") produced by the laser radiation reflected from a moving object and, based on charges in the speckle pattern, measure the velocity of the moving object.

    BACKGROUND OF THE INVENTION



    [0002] Several of the known methods for the measurement of speed with a velocity sensor include the balanced correlation measurement method, the space lattice measurement method and the zero-cross measurement method. In Japanese Kokai Patent Publication No. 63-31777, the applicant previously proposed a speckle velocity sensor arrangement that applies the balanced correlation measurement method, the details of which are incorporated herein by reference. As shown in Fig. 5, the speckle velocity sensor generally comprises a light emission and reception system 1, an analog signal processor 2 and a correlation processor 3.

    [0003] The detailed construction of the emission and reception system 1, which is shown in Fig. 6, includes a light source implemented by a semiconductor laser 4, the power output of which is stabilized by an automatic APC circuit 5. The emission beam from this semiconductor laser 4 is collimated by optics 6 and projected onto a moving object 7. The projected beam is scattered on the surface of the object 7 and the reflected radiation forms a speckle pattern owing to the coherence of the applied laser radiation. This speckle pattern is received by first and second light-receiving devices 8, 9 through their circular aperatures and the optical signals are photoelectrically converted and the resulting electrical signals are in turn fed to the signal processor 2.

    [0004] The light-receiving devices 8, 9 are disposed at a predetermined interval or spacing Xd in the direction of movement of the object 7, the spacing Xd being not less than the mean speckle size.

    [0005] The analog signal processor 2 discriminates the reception signals from the respective light receiving devices 8, 9 at a predetermined level and converts those signals into binary outputs C₁, C₂. The binary output C₂ from the second light-receiving device is delayed by a delay time τd with respect to the binary output C₁ from the first light-receiving device. Therefore, the binary output C₁ precedes the delayed binary output C₂ as inputs to the correlation processor 3.

    [0006] The correlation processor 3 comprises a variable clock generator 10, a delay generator 11, a correlation processor 12, a clock controller 13 and a conversion device 14. The variable clock generator 10 generates clock signals CK having a frequency fck such that the delay time τd will assume the constant number Kp of clocks. The delay generator 11 responds to the clock signal CK by applying the predetermined delay time τd to the preceding signal C₁.

    [0007] The correlation processor 12 receives this delayed preceding signal C₁, and delayed signal C₂ at the timing of clock signal CK and compares C₁ and C₂ to calculate a correlation frequency A and B. Specifically, the correlation processor 12 comprises an agreement device 15 and a pair of counters 16, 17 for counting the correlation frequencies A, B at the time points Kp + K (A) and Kp - K (B) preceding and following the delay time τd (corresponding to the number Kp clocks) (see Fig. 7).

    [0008] The clock controller 13 compares the correlation frequencies A and B at the time points Kp + K and Kp - K and, based on the result of this comparison, alters the frequency fck of the clock signals CK. The conversion device 14 calculates the velocity V of the object 7 using the altered frequency fck of the clock signal CK based on the above-described agreement of the correlation frequencies A and B.

    [0009] Fig. 8 illustrates the principle used for updating the frequency fck. The element I represents the agreement state A = B of the correlation frequency distribution; II represents the correlation frequency distribution where A < B, and III represents the correlation frequency distribution at A > B. It will be understood from this diagram thereby that when the correlation frequency distribution is A < B, the frequency fck of the clock signal CK is reduced and when the correlation frequency distribution is A > B, the frequency fck of the clock signal CK is increased. The frequency fck of clock signal CK is thus updated until the agreement state I where A = B is established. In state I, the conversion device 14 calculates the velocity V of the object 7 using the frequency fck in this balanced state, by means of the following equation:

    wherein δ is a speckle translation magnifying factor.

    [0010] By making use of the characteristic that the correlation frequency distribution has a substantially symmetrical configuration about Kp, this system first extracts the correlation frequencies at the symmetrical points Kp + K and Kp - K, compares the frequencies and, then based on the results of that comparison, alters the frequency fck of the clock signal CK so that the correlation frequencies at Kp + K and Kp - K are equalized.

    [0011] In the speckle velocity sensor of the above construction, the first and second light-receiving devices 8, 9 have circular apertures of a sufficiently large area to attain a high Signal-to-­Noise ratio. However, it has been found that the circular aperture configuration has drawbacks in that the correlation frequency is not sufficiently symmetrical. As a result, velocity measurement errors develop because of the asymmetrical characteristic of the correlation frequencies.

    [0012] The speckle velocity sensor according to the zero-cross method also has a drawback in that the circular aperature for the light-receiving devices 8, 9 is of such a large area that it causes light to be averaged. As a result, the number of zero cross counts is decreased since the light received through the aperture does not sharply change. As a result of this decreased zero cross-count, measurement errors occur.

    SUMMARY OF THE INVENTION



    [0013] In view of the foregoing, it should be apparent that there still exists a need in the art for a novel speckle velocity sensor that provides a relatively small measurement error by incorporating an aperature configuration for a light-receiving device.

    [0014] Briefly described, the present invention is directed to a speckle velocity sensor comprising a light-receiving device the aperture of which is elongated in a direction perpendicular to the direction of movement of the speckle pattern. Because this elongated aperture configuration is implemented as a sensor using the correlation method, the correlation frequency distribution is symmetrical and the measurement error is reduced. When implemented as a sensor according to the zero-cross measurement method, the number of zero crosses is increased, thus resulting in a reduced measurement error.

    [0015] Other objects and advantages of the invention will become apparent from the following description and accompanying drawings.

    BRIEF DESCRIPTION OF THE DRAWINGS.



    [0016] 

    FIG. 1 is a schematic diagram illustrating the aperture configurations of the light-receiving device forming a first embodiment of the present invention;

    FIGS. 2A, 2B, 2C and 2D are graphs that represent correlation intensity vs. delay time;

    FIG. 3 is a schematic diagram comparing the conventional aperture configuration with the aperture configuration according to the invention;

    FIG. 4 is a schematic diagram that illustrates the arrangement of light-receiving devices for a zero-cross type velocity sensor forming a second embodiment of the present invention;

    FIG. 5 is a block diagram showing the construction of the speckle velocity sensor employing the balanced correlation speed measurement method;

    FIG. 6 is a schematic view illustrating the construction of the light emission and reception system for the velocity sensor;

    FIG. 7 is a graph diagram of the correlation frequency distribution; and

    FIG. 8 is a graph diagram illustrating the principle for updating a clock frequency.


    DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS.



    [0017] The speckle velocity sensor of the present invention includes one or more light-receiving devices for receiving a speckle pattern according to the afore-described methods of velocity measurement. Taking a speckle velocity sensor according to the balanced correlation measurement method as an example, the sensor according to the invention comprises, just as the prior art sensor shown in Fig. 5, a light emission-reception device 1, an analog signal processor 2 and a correlation processor 3.

    [0018] Figs. 1 (1) through (3) illustrate apertures 20-22 for the light-receiving means 8, 9 shown generally in Fig. 6. The aperatures 20,20, 21,21 and 22,22 of the light-receiving devices are respectively positioned with a spacing Xd in the direction of movement of the speckle pattern (indicated by the arrows). Thus, in each of these light-receiving devices, the aperture is elongated in a direction perpendicular to the direction of movement of the speckle pattern.

    [0019] The aperatures 20, 21 and 22 illustrated in Figs. 1 (1) through (3) are elongated using a relatively large aspect ratio. The aperture 20 shown in Fig. 1 (1) is a rectangular aperture. The aperature 21 shown in Fig. 1 (2) is an oblong aperture with arcuate top and bottom sides. The aperture 22 shown in Fig. 1 (3) is an elliptical aperture with curved top, bottom, left and right sides.

    [0020] Figs. 2A-2D show the correlation frequency distribution pattern obtained with each of the speckle velocity sensors having a different aperture configuration as shown in Fig. 1 (1). In the graphs, correlation intensity data are plotted on the abscissa against the delay time on the ordinate. In Fig. 2A, the correlation characteristic curve a is the result produced by the prior art speckle velocity sensor in which the apertures of the two light-receiving devices are circular as illustrated in Fig. 3 (1), with the spacing Xd being 2.7 mm and the diameter R being 1 mm.

    [0021] The Fig. 2B correlation characteristic curve b is the result produced by a speckle velocity sensor having a rectangular aperture configuration as shown in Fig. 1(1) and elongated in a direction perpendicular to the direction of movement of the speckle pattern as illustrated in Fig. 3 (2). The area of the aperture of 3 (2) is equal to that of the aperture of Fig. 3 (1) and the dimensions of its sides are 3.14 mm for L₁ and 1 mm for D₁.

    [0022] The Fig. 2C correlation characteristic curve c is the result produced by a speckle velocity sensor of the invention having the rectangular apertures 25,25 shown in Fig. 3 (3). Specifically, the apertures of Fig. 3 (3) are more elongated and narrower than 3(2) where the aperture area is equal to that of Fig. 3 (1) but L₂ = 8.28 and D₂ = 0.5 mm.

    [0023] The Fig. 2D correlation characteristic curve d is the result produced by a speckle velocity sensor of the invention wherein the apertures 26,26 of Fig. 3 (4) are yet still more elongated and narrower than as illustrated in Fig. 3 (3). The area of each aperture is equal to that shown in Fig. 3 (1) but L₂ = 12.56 mm and D₂ = 0.25 mm.

    [0024] In all of the arrangements depicted in Fig. 3 (2) through 3 (4), the spacing Xd between the two apertures is the same 2.7 mm.

    [0025] It is seen from Fig. 2, therefore, that compared with the Fig. 2A correlation characteristic curve a produced by the circular aperture 23,23, the Figs. 2B-2D correlation characteristic curves b, c and d are more accurately symmetrical about the peak point. Furthermore, as demonstrated by Figs. 2A-­2D, the shorter the aperture dimension parallel to the direction of movement of the speckle pattern, the more symmetrical the correlation characteristic curve. Thus, when the aperture of the light-receiving device is elongated in a direction perpendicular to the direction of movement of the speckle pattern, the symmetry of the correlation characteristic curve (correlation frequency distribution) of a correlation speckle velocity sensor is increased which results in diminished measurement error.

    [0026] Fig. 4 indicates the arrangement of three light-receiving devices in a speckle velocity sensor according to the zero-cross method. The apertures 27-29 of these light-receiving devices are also elongated in a direction perpendicular to the direction of movement indicated by arrow S of the speckle pattern.

    [0027] Although, in this embodiment, three light-receiving devices are used for averaging the measured zero cross counts, it is possible to employ only one, or for that matter, any number of optional light-receiving devices. The advantage of this arrangement is that when the aperture of the light-receiving device in a zero-cross speckle velocity sensor is elongated in a direction perpendicular to the direction of movement of the speckle pattern, the small slit shape of the aperture causes the contrasts in changes in a moving speckle pattern to be more sharply represented. As a result, the number of zero crosses counted by the velocity measurement system in increased and measurement error is diminished.

    [0028] The above description and the accompanying drawings are merely illustrative of the application of the principles of the present invention and are not limiting. Numerous other arrangements which embody the principles of the invention and which fall within its spirit and scope may be readily devised by those skilled in the art. Accordingly, the invention is not limited by the foregoing description, but is only limited by the scope of the appended claims.


    Claims

    1. A speckle velocity sensor comprising:
    light projecting means for projecting light on a moving object to create a moving reflection speckle pattern; and
    light receiving means for reception of said speckle pattern reflected by said moving object wherein said light receiving means includes at least one light reception aperture elongated in a direction substantially perpendicular to a direction of movement of said speckle pattern.
     
    2. The speckle velocity sensor of claim 1, wherein said light projecting means comprises a laser beam source which projects a laser beam onto said moving object.
     
    3. The speckle velocity sensor of claim 1, wherein said light reception aperture is substantially rectangular.
     
    4. The speckle velocity sensor of claim 1, wherein said light reception aperture is oblong having substantially arcuate top and bottom sides.
     
    5. The speckle velocity sensor according to claim 1, wherein said light reception aperture is substantially elliptical having curved sides.
     
    6. The speckle velocity sensor according to claim 1, further comprising means for performing a velocity correlation measurement producing a correlation characteristic curve having a peak measurement point and wherein said elongated light-receiving means produces increased symmetrical correlation and frequency distribution about said peak measurement point.
     
    7. The speckle velocity sensor according to claim 6, such that said elongated light reception aperture has its narrowest dimension substantially parallel to a direction of movement of said speckle pattern.
     
    8. The speckle velocity sensor according to claim 1, wherein said light receiving means comprises a plurality of light receiving devices each having a reception aperture which is elongated in a direction perpendicular to a direction of the movement of said speckle pattern.
     




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