(19)
(11) EP 0 420 700 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
02.07.2003 Bulletin 2003/27

(45) Mention of the grant of the patent:
05.04.2000 Bulletin 2000/14

(21) Application number: 90310709.2

(22) Date of filing: 28.09.1990
(51) International Patent Classification (IPC)7: G03F 9/00

(54)

Exposure apparatus

Belichtungsvorrichtung

Appareil d'exposition

(84) Designated Contracting States:
DE FR GB IT NL

(30) Priority: 29.09.1989 JP 25234889

(43) Date of publication of application:
03.04.1991 Bulletin 1991/14

(73) Proprietor: CANON KABUSHIKI KAISHA
Tokyo (JP)

(72) Inventors:
  • Ozawa, Kunitaka, c/o Canon Kabushiki Kaisha
    Tokyo (JP)
  • Uzawa, Shunichi, c/o Canon Kabushiki Kaisha
    Tokyo (JP)
  • Ohta, Hirohisa, c/o Canon Kabushiki Kaisha
    Tokyo (JP)
  • Mori, Makiko, c/o Canon Kabushiki Kaisha
    Tokyo (JP)
  • Nose, Noriyuki, c/o Canon Kabushiki Kaisha
    Tokyo (JP)

(74) Representative: Beresford, Keith Denis Lewis et al
BERESFORD & Co. 2-5 Warwick Court, High Holborn
London WC1R 5DH
London WC1R 5DH (GB)


(56) References cited: : 
US-A- 4 801 208
 US-A- 4 853 745
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).