(19)
(11) EP 0 421 983 A1

(12)

(43) Date of publication:
17.04.1991 Bulletin 1991/16

(21) Application number: 88903295.0

(22) Date of filing: 08.04.1988
(51) International Patent Classification (IPC): 
G01R 33/ 035( . )
H01L 39/ 22( . )
H01L 39/ 12( . )
H01L 39/ 24( . )
(86) International application number:
PCT/GB1988/000275
(87) International publication number:
WO 1988/008207 (20.10.1988 Gazette 1988/23)
(84) Designated Contracting States:
BE DE FR GB IT NL SE

(30) Priority: 08.04.1987 GB 19870008399
08.08.1987 GB 19870018855

(71) Applicant: IMPERIAL CHEMICAL INDUSTRIES PLC
London SW1P 3JF (GB)

(72) Inventors:
  • GOUGH, C. Dept. of Physics
    Edgbaston Birmingham mingham (GB)
  • MUIRHEAD, C. Dept. of Physics
    Edgbaston Birminghamg (GB)
  • ABELL, J. Dept. of Physics
    Edgbaston Birmingham ngham (GB)

(74) Representative: Pearce, Anthony Richmond, et al 
MARKS & CLERK, Alpha Tower, Suffolk Street Queensway
Birmingham B1 1TT
Birmingham B1 1TT (GB)

   


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