(19)
(11) EP 0 430 068 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
01.04.1992 Bulletin 1992/14

(43) Date of publication A2:
05.06.1991 Bulletin 1991/23

(21) Application number: 90122303.2

(22) Date of filing: 22.11.1990
(51) International Patent Classification (IPC)5: H01L 27/148
(84) Designated Contracting States:
DE FR GB

(30) Priority: 22.11.1989 JP 303572/89

(71) Applicant: HAMAMATSU PHOTONICS K.K.
Shizuoka-ken (JP)

(72) Inventors:
  • Kinoshita, Katsuyuki
    Hamamatsu-shi, Shizuoka-ken (JP)
  • Inagaki, Yoshinori
    Hamamatsu-shi, Shizuoka-ken (JP)

(74) Representative: Lehn, Werner, Dipl.-Ing. et al
Hoffmann, Eitle & Partner, Patentanwälte, Postfach 81 04 20
81904 München
81904 München (DE)


(56) References cited: : 
   
       


    (54) Imaging device


    (57) An imaging device comprising a vacuum vessel, an electron source arranged in the vessel and a solid-state image sensor arranged to receive signal electrons emitted from the electron source. The solid-state image sensor comprises a charge transferring device, picture element electrodes, an electron multiplier layer, and a surface electrode layer. The picture element electrodes are connected to the charge transferring device and cover the major part of this device. The surface electrode layer and the electron multiplier layer are stacked on the picture element electrodes. The surface electrode layer formed on the electron multiplier layer transmits the incident signal electrons to the electron multiplier layer.







    Search report