(19) |
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(11) |
EP 0 435 338 A3 |
(12) |
EUROPEAN PATENT APPLICATION |
(88) |
Date of publication A3: |
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17.06.1992 Bulletin 1992/25 |
(43) |
Date of publication A2: |
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03.07.1991 Bulletin 1991/27 |
(22) |
Date of filing: 28.12.1990 |
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(84) |
Designated Contracting States: |
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AT BE CH DE DK ES FR GB GR IT LI LU NL SE |
(30) |
Priority: |
28.12.1989 JP 343840/89
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(71) |
Applicant: EBARA CORPORATION |
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Ohta-ku
Tokyo,144 (JP) |
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(72) |
Inventor: |
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- Matsumura, Masao
Chigasaki-shi,
Kanagawa-ken (JP)
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(74) |
Representative: Geyer, Ulrich F., Dr. Dipl.-Phys. et al |
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WAGNER & GEYER,
Patentanwälte,
Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
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(57) A storage vessel maintaining clean environment for storing articles such as semiconductor
wafers includes a plurality of receivers (6) fixed to a shaft (8) for horizontal rotation.
The receivers support carriers (7) having the articles therein. Both thrust and radial
bearings (2-4) supporting the shaft are of a non-contacting magnetic type. The shaft
is driven by a motor (5) with a rotor (19) fixed to the shaft and a stator (20) facing
the rotor. The vessel may have a vacuum or be charged with inert gas.