(19)
(11) EP 0 435 338 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
17.06.1992 Bulletin 1992/25

(43) Date of publication A2:
03.07.1991 Bulletin 1991/27

(21) Application number: 90125732.9

(22) Date of filing: 28.12.1990
(51) International Patent Classification (IPC)5H01L 21/00, B65G 1/12
(84) Designated Contracting States:
AT BE CH DE DK ES FR GB GR IT LI LU NL SE

(30) Priority: 28.12.1989 JP 343840/89

(71) Applicant: EBARA CORPORATION
Ohta-ku Tokyo,144 (JP)

(72) Inventor:
  • Matsumura, Masao
    Chigasaki-shi, Kanagawa-ken (JP)

(74) Representative: Geyer, Ulrich F., Dr. Dipl.-Phys. et al
WAGNER & GEYER, Patentanwälte, Gewürzmühlstrasse 5
80538 München
80538 München (DE)


(56) References cited: : 
   
       


    (54) Storage vessel


    (57) A storage vessel maintaining clean environment for storing articles such as semiconductor wafers includes a plurality of receivers (6) fixed to a shaft (8) for horizontal rotation. The receivers support carriers (7) having the articles therein. Both thrust and radial bearings (2-4) supporting the shaft are of a non-contacting magnetic type. The shaft is driven by a motor (5) with a rotor (19) fixed to the shaft and a stator (20) facing the rotor. The vessel may have a vacuum or be charged with inert gas.





    Search report