(19)
(11) EP 0 438 586 A1

(12)

(43) Date of publication:
31.07.1991 Bulletin 1991/31

(21) Application number: 90913424.0

(22) Date of filing: 06.08.1990
(51) International Patent Classification (IPC): 
H01L 31/ 09( . )
H01L 31/ 0232( . )
(86) International application number:
PCT/US1990/004388
(87) International publication number:
WO 1991/002380 (21.02.1991 Gazette 1991/05)
(84) Designated Contracting States:
DE FR GB IT NL

(30) Priority: 11.08.1989 US 19890392751

(71) Applicant: Santa Barbara Research Center
Goleta California 93117 (US)

(72) Inventors:
  • NORTON, Paul, R.
    Santa Barbara, CA 93105 (US)
  • WISE, Timothy, D.
    Buellton, CA 93427 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
D-80538 München
D-80538 München (DE)

   


(54) METHOD OF FABRICATING A BINARY OPTICS MICROLENS UPON A DETECTOR ARRAY