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(11) | EP 0 459 481 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Method of manufacturing thermal head |
(57) A method for manufacturing a thermal head comprising the steps of forming a heat
resistant resin layer (12) on the surface of a substrate (11), removing a part of
the heat resistant resin layer (12) by a photochemical reaction using an excimer laser
beam having a wavelength of 150 to 400nm, thereby exposing a part of the substrate
(11), forming a heat-generating resistive layer (14), an individual electrode (15)
and a conductive layer (16) on the heat resistant resin layer and the exposed part
of the substrate (11). |