NOVEL GLASS DEPOSITION VISCOELASTIC FLOW PROCESS - Patent 0460106

(19)

(11)

EP 0 460 106 A1

(12)

(43)	Date of publication:
	11.12.1991 Bulletin 1991/50

(21)	Application number: 90905069.0

(22)	Date of filing: 20.02.1990

(51)

International Patent Classification (IPC):

C23C 16/ 40^{( . )}
C23C 16/ 46^{( . )}
H01L 21/ 316^{( . )}
H01L 21/ 762^{( . )}

C23C 16/ 455^{( . )}
H01L 21/ 3105^{( . )}
H01L 21/ 318^{( . )}
C23C 16/ 44^{( . )}

(86)	International application number:
	PCT/US1990/001036

(87)	International publication number:
	WO 1990/010307 (07.09.1990 Gazette 1990/21)

(84)	Designated Contracting States:
	DE FR GB IT NL

(30)

Priority:

21.02.1989 US 19890314404

(71)	Applicant: LAM RESEARCH CORPORATION
	Fremont, CA 94538-6401 (US)

(72)	Inventors:
	MONKOWSKI, Joseph, R. Danville, CA 94528 (US) LOGAN, Mark, A. Leucadia, CA 92024 (US) WRIGHT, Lloyd, F. Carlsbad, CA 92008 (US)

(74)	Representative: Wombwell, Francis, et al
	Potts, Kerr & Co. 15, Hamilton Square Birkenhead Merseyside L41 6BR Birkenhead Merseyside L41 6BR (GB)

(54)	NOVEL GLASS DEPOSITION VISCOELASTIC FLOW PROCESS