METHOD AND DEVICE FOR TREATING A SUBSTRATE WITH A PLASMA - Patent 0463137

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EP 0 463 137 A1

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(43)	Date of publication:
	02.01.1992 Bulletin 1992/01

(21)	Application number: 91902159.0

(22)	Date of filing: 09.01.1991

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International Patent Classification (IPC):

C23C 14/ 35^{( . )}
H01J 37/ 32^{( . )}
H05H 1/ 46^{( . )}

C23F 4/ 00^{( . )}
H01L 21/ 302^{( . )}

(86)	International application number:
	PCT/EP1991/000066

(87)	International publication number:
	WO 1991/011018 (25.07.1991 Gazette 1991/17)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FR GB GR IT LI LU NL SE

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Priority:

15.01.1990 NL 19900000093

(71)	Applicant: COBRAIN N.V.
	B-3030 Heverlee (BE)

(72)	Inventor:
	BRASSEUR, Guy, Jean, Jacques B-3307 Tienen (BE)

(74)	Representative: Land, Addick Adrianus Gosling, et al
	Arnold & Siedsma, Advocaten en Octrooigemachtigden, Sweelinckplein 1 NL-2517 GK Den Haag NL-2517 GK Den Haag (NL)

(54)	METHOD AND DEVICE FOR TREATING A SUBSTRATE WITH A PLASMA