<?xml version="1.0" encoding="UTF-8"?><!DOCTYPE ep-patent-document PUBLIC "-//EPO//EP PATENT DOCUMENT 1.4//EN" "ep-patent-document-v1-4.dtd"><ep-patent-document id="EP0463137A1" file="EP91902159NWA1.xml" lang="en" doc-number="0463137" date-publ="19920102" kind="A1" country="EP" status="n" dtd-version="ep-patent-document-v1-4"><SDOBI lang="en"><B000><eptags><B001EP>ATBECHDEDKESFRGBGRITLILUNLSE........................................................................</B001EP><B003EP>*</B003EP><B007EP>EPregister to ST.36 EBD process v 1.0 kbaumeister@epo.org (15 Jan 2013)</B007EP></eptags></B000><B100><B110>0463137</B110><B130>A1</B130><B140><date>19920102</date></B140><B190>EP</B190></B100><B200><B210>91902159.0</B210><B220><date>19910109</date></B220><B240><B241><date>19910830</date></B241></B240><B250>en</B250><B251EP>en</B251EP><B260>en</B260></B200><B300><B310>19900000093</B310><B320><date>19900115</date></B320><B330><ctry>NL</ctry></B330></B300><B400><B405><date>19920102</date><bnum>199201</bnum></B405><B430><date>19920102</date><bnum>199201</bnum></B430></B400><B500><B510EP><classification-ipcr sequence="1"><text>C23C  14/    35            A I                    </text></classification-ipcr><classification-ipcr sequence="2"><text>C23F   4/    00            A I                    </text></classification-ipcr><classification-ipcr sequence="3"><text>H01J  37/    32            A I                    </text></classification-ipcr><classification-ipcr sequence="4"><text>H01L  21/   302            A I                    </text></classification-ipcr><classification-ipcr sequence="5"><text>H05H   1/    46            A I                    </text></classification-ipcr></B510EP><B540><B541>en</B541><B542>METHOD AND DEVICE FOR TREATING A SUBSTRATE WITH A PLASMA</B542><B541>fr</B541><B542>PROCEDE ET DISPOSITIF DE TRAITEMENT D'UN SUBSTRAT PAR UN PLASMA</B542><B541>de</B541><B542>VERFAHREN UND ANORDNUNG ZUR PLASMABEHANDLUNG EINES SUBSTRATES</B542></B540></B500><B700><B710><B711><snm>COBRAIN N.V.</snm><adr><str>Kapeldreef 60</str><city>B-3030 Heverlee</city><ctry>BE</ctry></adr></B711></B710><B720><B721><snm>BRASSEUR, Guy, Jean, Jacques</snm><adr><str>Kümtichstraat 36</str><city>B-3307 Tienen</city><ctry>BE</ctry></adr></B721></B720><B740><B741><snm>Land, Addick Adrianus Gosling, et al</snm><adr><str>Arnold &amp; Siedsma, Advocaten en Octrooigemachtigden, Sweelinckplein 1</str><city>NL-2517 GK  Den Haag</city><ctry>NL</ctry></adr></B741></B740></B700><B800><B840><ctry>AT</ctry><ctry>BE</ctry><ctry>CH</ctry><ctry>DE</ctry><ctry>DK</ctry><ctry>ES</ctry><ctry>FR</ctry><ctry>GB</ctry><ctry>GR</ctry><ctry>IT</ctry><ctry>LI</ctry><ctry>LU</ctry><ctry>NL</ctry><ctry>SE</ctry></B840><B860><B861><dnum><anum>EP1991000066</anum></dnum><date>19910109</date></B861><B862>en</B862></B860><B870><B871><dnum><pnum>WO1991011018</pnum></dnum><date>19910725</date><bnum>199117</bnum></B871></B870></B800></SDOBI></ep-patent-document>