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(11) | EP 0 465 212 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Ink jet printheads |
(57) A thermal inkjet printhead is disclosed having improved reliability and thermal efficiency.
The printhead includes heater resistors (14) and thin protective regions (46) positioned
above the heating resistors for protecting the heating resistors from corrosion and
cavitation damage from the ink. The heating resistors are positioned substantially
within the geometric confines of the portion of the protective regions exposed to
the ink. Positioned between the resistors and the underlying printhead structure are
field oxide regions (60) that thermally insulate the heating resistors from the underlying
printhead structure. Positioned between the resistors and the underlying printhead
structure is a passivation layer consisting of a middle layer (62) of phosphorus glass,
an underglaze (64) between the middle layer and the underlying printhead structure,
and glass mesas (66) between the middle layer and the resistors. The underglaze helps
prevent phosphorus from the middle layer from contaminating the underlying printhead
structure. Similarly, the glass mesas prevent phosphorus from the middle layer from
contaminating the resistors. |