(19)
(11) EP 0 469 053 A1

(12)

(43) Date of publication:
05.02.1992 Bulletin 1992/06

(21) Application number: 90907212.0

(22) Date of filing: 20.04.1990
(51) International Patent Classification (IPC): 
C01G 23/ 00( . )
C04B 35/ 49( . )
C04B 35/ 626( . )
C01G 25/ 00( . )
C04B 35/ 491( . )
H01L 41/ 24( . )
(86) International application number:
PCT/GB1990/000612
(87) International publication number:
WO 1990/012755 (01.11.1990 Gazette 1990/25)
(84) Designated Contracting States:
AT BE CH DE DK ES FR GB IT LI LU NL SE

(30) Priority: 21.04.1989 GB 19890009107
10.05.1989 GB 19890010717

(71) Applicant: ALCAN INTERNATIONAL LIMITED
Montreal Quebec H3A 3G2 (CA)

(72) Inventors:
  • GROVES, Paul
    Oxford OX5 1EY (GB)
  • STEWARD, Nigel, I.
    Oxon OX16 7UD (GB)
  • LANDHAM, Rowena, Roshanthi
    West Midlands B91 1PF (GB)
  • TEAT, Simon, J.
    Banbury Oxon OX16 8BU (GB)
  • WARRENDER, Theresa, E.
    Oxford OX5 1QN (GB)

(74) Representative: Pennant, Pyers 
Stevens, Hewlett & Perkins 1 Serjeants' Inn Fleet Street
London EC4Y 1LL
London EC4Y 1LL (GB)

   


(54) PREPARATION OF THIN FILM CERAMICS BY SOL GEL PROCESSING