(19)

(11)

EP 0 483 365 A1

(12)

(43) Date of publication: 06.05.1992 Bulletin 1992/19 (21) Application number: 91908635.0 (22) Date of filing: 24.04.1991

(51) International Patent Classification (IPC):  C30B 15/ 12( . ) C30B 29/ 06( . ) C30B 15/ 14( . ) H01L 21/ 208( . ) (86) International application number: PCT/JP1991/000546 (87) International publication number: WO 1991/017288 (14.11.1991 Gazette 1991/26)

(84) Designated Contracting States: DE FR NL (30) Priority: 27.04.1990 JP 19900114522 (71) Applicant: NKK CORPORATION Tokyo 100 (JP)	(72) Inventors: SHIMA, Yoshinobu, NKK Corporation Chiyoda-ku Tokyo 100 (JP) KAMIO, Hiroshi, NKK Corporation Tokyo 100 (JP) SUZUKI, Makoto, NKK Corporation Tokyo 100 (JP) (74) Representative: Klöpsch, Gerald, Dr.-Ing. Patentanwalt, et al  An Gross St. Martin 6 D-50667 Köln D-50667 Köln (DE)