OPTICAL EMISSION SPECTROSCOPY TO DETERMINE ETCH COMPLETION OF INDIUM TIN OXIDE - Patent 0485590

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(11)

EP 0 485 590 A1

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(43)	Date of publication:
	20.05.1992 Bulletin 1992/21

(21)	Application number: 91911969.0

(22)	Date of filing: 03.06.1991

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International Patent Classification (IPC):

H01L 21/ 302^{( . )}
C04B 41/ 91^{( . )}
H01L 31/ 18^{( . )}

C04B 41/ 53^{( . )}
H01L 27/ 146^{( . )}

(86)	International application number:
	PCT/US1991/003664

(87)	International publication number:
	WO 1991/019325 (22.12.1991 Gazette 1992/01)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

04.06.1990 US 19900533217

(71)	Applicant: EASTMAN KODAK COMPANY
	Rochester, New York 14650-2201 (US)

(72)	Inventor:
	ROSELLE, Paul, L. c/o Eastman Kodak Company Rochester, New York 14650-2201 (US)

(74)	Representative: Buff, Michel, et al
	Kodak-Pathé Département des Brevets et Licences CRT Centre de Recherches et de Technologie Zone Industrielle F-71102 Chalon sur Saône Cédex F-71102 Chalon sur Saône Cédex (FR)

(54)	OPTICAL EMISSION SPECTROSCOPY TO DETERMINE ETCH COMPLETION OF INDIUM TIN OXIDE