(19)
(11) EP 0 507 813 A1

(12)

(43) Date of publication:
14.10.1992 Bulletin 1992/42

(21) Application number: 91901456.0

(22) Date of filing: 28.12.1990
(51) International Patent Classification (IPC): 
G01L 9/ 00( . )
(86) International application number:
PCT/GB1990/002035
(87) International publication number:
WO 1991/010120 (11.07.1991 Gazette 1991/15)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 28.12.1989 GB 19890029276
29.12.1989 GB 19890029307

(71) Applicant: BRITISH TECHNOLOGY GROUP LTD
London SE1 6BU (GB)

(72) Inventor:
  • ROGERS, Tony, William, James
    Reading Berkshire RG3 2EU (GB)

(74) Representative: Gaskin, John Shield 
Patents Department British Technology Group Ltd 101 Newington Causeway
London SE1 6BU
London SE1 6BU (GB)

   


(54) SEMICONDUCTOR CAVITY DEVICE WITH ELECTRIC LEAD