(19)

(11)

EP 0 513 100 A1

(12)

(43) Date of publication: 19.11.1992 Bulletin 1992/47 (21) Application number: 91903273.0 (22) Date of filing: 17.01.1991

(51) International Patent Classification (IPC):  H01L 27/ 12( . ) H01L 21/ 20( . ) H01L 21/ 02( . ) H01L 21/ 762( . ) (86) International application number: PCT/SE1991/000029 (87) International publication number: WO 1991/011822 (08.08.1991 Gazette 1991/18)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 24.01.1990 SE 19900000245 (71) Applicant: ASEA BROWN BOVERI AB S-721 83 Västeras (SE)	(72) Inventor: SVEDBERG, Per S-162 46 Vällingby (SE) (74) Representative: Boecker, Joachim, Dr.-Ing.  Adelonstrasse 58 D-65929 Frankfurt am Main D-65929 Frankfurt am Main (DE)