Technical Field
[0001] The present invention relates to an Fe-base soft magnetic alloy and, in particular,
to an alloy having excellent soft magnetic properties.
Background of the Invention
[0002] Fe-base amorphous magnetic alloys having a high saturation magnetic flux density
are known to be used as magnetic core materials for high frequency transformers, saturable
reactors, choke coils, etc. However, though Fe-base amorphous magnetic alloys are
lower priced than Co-base ones, the former have the drawbacks of high saturation magnetostriction
and core loss and a low permeability.
[0003] A method of producing an Fe-base amorphous alloy has been reported recently in which
a thin Fe-base amorphous ribbonformed by rapidly quenching an alloy composition melt
is heat-treated to generate fine crystalline particles having a particle size of about
100 Å or so. The Fe-base amorphous alloy thus produced exhibits better soft magnetic
properties than any other conventional Fe-base amorphous alloys (Japanese Patent Application
Laid-Open No. 64-79342, Japanese Patent Application Laid-Open No. Hei1-156452, U.S.P.
4,881,989). The reported Fe-base amorphous alloy has a basic composition of FeSiB
and additionally contains high melting point metals such as Cu, Nb, etc., in which
the alloy structure has been finely crystallized to obtain fine crystalline particles
having a particle size of about 100 Å or so. Accordingly, the Fe-base amorphous alloy
has become possible to have a lowered saturation magnetostriction, though conventional
Fe-base amorphous alloys were difficult to have it. As a result, the reported Fe-base
amorphous alloy is said to have improved soft magnetic properties, especially improved
frequency characteristics of magnetic permeability.
[0004] However, when Cu is added to the alloy, Cu tends to gather by itself to cause heterogeneity
of the alloy. Thereby, there can be such drawback as difficulty of forming a thin
film by a single roll method or sticking of Cu to the nozzle which brings on a change
in the composition of the alloy.
[0005] On the other hand, regarding Cu-free fine crystalline soft magnetic alloys, Fe-Ta-C
alloys have been reported (Hasegawa, et al., Journal of Applied Magnetics Society
of Japan, 14, 313, 1990). However, these alloys could not be said sufficient in view
of the practicability (economical efficiency) thereof.
[0006] One object of the present invention is to provide a novel Fe-base soft magnetic alloy,
which is a soft magnetic material substitutable for the above-mentioned conventional
soft magnetic materials and which has an extremely low saturation magnetostriction
with having excellent high frequency magnetic properties, in particular, having a
high permeability and a low iron loss in a high frequency region.
[0007] Another object of the present invention is to provide a Fe-base soft magnetic alloy
which is a metal-metalloid alloy having a relatively low melting point and which can
be produced by the use of any conventional device for producing ordinary magnetic
materials.
Disclosure of the Invention
[0008] Intense reserches and studies of various Fe-base soft magnetic alloys in view of
the above objects have revealed that addition of Al to an Fe-base Fe-Si-B soft magnetic
alloy can provide an improved Fe-base Fe-Si-B-Al soft magnetic alloy having excellent
soft magnetic characteristics, for example, having an extremely low saturation magnetostriction,
and that addition of other particular metal(s), especially Nb, to such an Fe-base
Fe-Si-B-Al soft magnetic alloy is effective for obtaining excellent soft magnetic
properties of the resulting alloy. The present invention is based on these findings.
[0009] Specifically, there is provided in accordance with the present invention an Fe-base
soft magnetic alloy which has a composition represented by the formula:
(Fe
1-xM
x)
100-a-b-c-dSi
aAl
bB
cM'
d
where M is Co and/or Ni;
M' is at least one element selected from the group consisting of Nb, Mo, Zr, W, Ta,
Hf, Ti, V, Cr, Mn, Y, Pd, Ru, Ga, Ge, C and P;
x is an atomic ratio;
a, b, c and d each are an atomic %; and
x, a, b, c and d each satisfy 0 ≦ x ≦ 0.15, 0 ≦ a ≦ 24, 2 < b ≦ 15, 4 ≦ c ≦ 20, and
0 ≦ d ≦ 10. In particular, at least 30 % of the alloy structure is desired to be occupied
by a crystalline phase (fine crystalline particles), and the crystalline phase is
desired to be composed of an iron solid solution having a bcc structure. M' is preferably
Nb.
[0010] The Fe-base soft magnetic alloys of the present invetnion contain less than 0.5,
preferably less than 0.1 atomic % copper (Cu) and more preferably entirely free of
copper in view of magnetic properties.
[0011] In the Fe-base soft magnetic alloy of the present invention, Fe may be substituted
by Co and/or Ni in the range of from 0 to 0.15 for the value x. Since Co and Ni have
a negative interaction parameter relative to Fe, it is believed that they are substituted
for Fe in the bcc structure latice by dissolving in the Fe-major bcc solid solution
formed during the heat treatment of the alloy of the present invention. Accordingly,
it is believed that a magnetostriction constant and a magnetocrystalline anisotropy
constant of the bcc solid solution would be reduced. Since the alloy of the present
invention where the Ni (and/or Co) content (x) is 0 ≦ x ≦ 0.02, particulary x = 0,
i.e. including no Ni nor Co, has a high permeability, it is preferably applied to
such a use that requires a high permeability, as (material for magnetic core of) a
common mode choke coil, an inductor for filters, transformers for signals and so on.
[0012] On the other hand, in case that the Ni (and/or Co) content (x) is 0.02 ≦ x ≦ 0.15,
such effect is obtained that the magnetostriction constant and a magnetocrystalline
anisotropy constant of the alloy are reduced as noted previously, accompanied with
the effect that the alloy has a high permeability. Further, a magnetocrystalline anisotropy
is sufficiently induced in the alloy by heat treatment in a magnetic field. Accordingly,
the alloy is preferably applied to such a use as (material for magnetic core of) common-mode
choke coil, an inductance coil for filters, transformers for signals, a high frequency
transformer, a magnetic amplifier and so on. In this case, the Ni (and/or Co) content
(x) is preferably 0.02 ≦ x ≦ 0.15, and more preferably 0.03 ≦ x ≦ 0.1.
[0013] Al is an essential element of constituting the alloy of the present invention, and
addition of a determined amount (more than 2 and not more than 15 atomic %) of Al
to the alloy causes enlargement of the temperature difference (ΔT) between the crystallization
temperature (TX₁) of the soft magnetic crystals having a small magnetocrystalline
anisotropy (Fe-base bcc solid solution) and the crystallization temperature (TX₂)
of the crystals of interfering with the soft magnetic property (for example, Fe-B
crystals) to thereby inhibit formation of Fe-B crystals in heat-treatment of the alloy
composition and lead the resulting alloy to having sufficient soft magnetic properties
by heat-treatment at a relatively low temperature. Fig. 1 shows the relationship between
the crystallization temperature of an Fe-base soft magnetic alloy to which Al is added
and the Al content atomic % in the alloy. From Fig. 1, it is noted that increase of
the Al content in the alloy causes simple decrease of TX1 while TX₂ is relatively
unchanged irrespective of the variation of the Al content, so that the increase of
the Al content in the alloy thereby causes increase of the temperature difference
(ΔT) between TX₁ and TX₂.
[0014] In the present invention, the Al content (b) in the alloy is more than 2 atomic %
and not more than 15 atomic %, preferably from 2.5 atomic % to 15 atomic % and more
preferably from 3 to 12 atomic %. Determination of the Al content in the range 3 to
12 atomic % causes a high permeability and a low core loss. In case that the Ni/Co
content (x) is 0 ≦ x < 0.02, especially x = 0, the Al content (b) is preferably from
6 to 12 atomic %, more preferably from 6 to 10 atomic %, and most preferbly from 7
to 10 atomic %.
[0015] Since Al, similar to Ni (Co), has a negative interaction parameter relative to Fe,
it is believed that addition of Al results in it's dissolution in the Fe-major solid
solution, that is, dissolution in the way to be substituted for the Fe atom in the
α-Fe crystal structure and stabilization of the bcc crystal. Thereby an environment
of easy self-crystallization in the alloy during heat-treatment yields. Accordingly,
since crystal grains having a small magnetocrystalline anisotropy are selectively
formed in the alloy by addition of Al thereto, as mentioned above, it is believed
that the alloy would have an excellent soft magnetic properties because of such morphology.
[0016] Si and B are elements which make the Fe-base soft magnetic alloy of the present invention
amorphous in the initial stage (before heat-treatment). The Si content in the alloy
of the present invention is from 0 to 24 atomic %, preferably from 6 to 18 atomic
%, and more preferably from 10 to 16 atomic %. Determination of the Si content in
the said range preferably causes improvement of the ability of formation of amorphous
in the initial stage (before the heat-treatment).
[0017] The B content (c) in the alloy of the present invention is from 4 to 20 atomic %,
preferably from 6 to 15 atomic %, and more preferably from 10 to 14 atomic %. Within
the determined range of B, a sufficient temperature difference between the crystallization
temperatures (TX₁ and TX₂) can be obtained and the alloy may be made amorphous with
ease. The ability of formation of amorphous changes acccording to whether the content
of B is more or less than 9 atomic %. In the range of the content of B being 9.5-15
atomic %, particularly 10-14 atomic %, the amorphous alloy including Al is provided
an excellent ability of amorphous formation and uniformalized crystal grains are obtained
after heat treatment.
[0018] The basic composition of the Fe-base soft magnetic alloy of the present invention
is composed of the above-mentioned Fe (M), B, Si and Al. In order to improve the corrosion-resistance
and the magnetic properties of the alloy of the present invention, other element(s)
M' may be added to the alloy. As M' is mentioned at least one, i.e. one or more of
the elements selected from the group consisting of Nb, Mo, Zr, W, Ta, Hf, Ti, V, Cr,
Mn, Y, Pd, Ru, Ga, Ge, C and P. Addition of the M' elements is effective for improving
the ability of the base composition of Fe-Si-Al-B alloy of forming the amorphous phase
of the alloy.
[0019] The Nb, W, Ta, Zr, Hf, Ti and Mo elements are particularly effective to prevent crystallization
of the Fe-B crystalline which hampers the soft magnetic properties of the alloy or
to elevate it's crystallization temperature, whereby it improves the soft magnetic
properties of the alloy. Further, addition of these elements to the alloy makes the
crystal grain fine. The V, Cr, Mn, Y and Ru elements are particularly effective in
improving the anti-corrosion properties of the alloy. The C, Ge, P and Ga elements
are particularly effective in the process of forming the amorphous alloy. One more
of the foregoing elements can be added. As these elements M', preferred are Nb, Ta,
W, Mn, Mo and V. Above all, Nb is most preferred. Addition of Nb results in an extreme
improvement of the soft magnetic properties, especially the coercive force, permeability
and core loss of the alloy. The content of the M' element(s) is from 1 to 10 atomic
%, preferably from 1 to 8 atomic %, more preferably from 1 to 6 atomic %. Addition
of the M' element(s) to the alloy of the present invention in such an amount as falling
within the determined range forms in the alloy compound(s) of the added element(s)
which may retard deterioration of the amorphous phase-forming ability and the magnetic
properties of the alloy.
[0020] Incidentally, alloy further containing inevitable impurities such as N, S, O etc.,
is also comprised in the alloy composition of the presnet invention.
[0021] The Fe-base soft magnetic alloy according to the present invention has an alloy structure,
at least 30 % of which consists of crystal (fine crystalline particles), with the
balance of the structure being an amorphous phase. The range of the ratio of the fine
crystalline particles in the structure provides the alloy excellent (soft) magnetic
properties. In the present invention, even if the crystalline particles occupy substantially
100 % of the structure, the alloy has yet sufficiently good magnetic properties. Preferably
at least 60 %, more preferably 80 % or more of the alloy structure consists of the
fine crystalline particles in view of magnetic properties.
[0022] The crystalline particles of the alloy of the present invention has a bcc structure,
where Fe as a main component and Si, B, Al (occasionally Ni and/or Co) are dissolved
in.
[0023] It is preferred that the crystalline particles to be formed in the alloy of the present
invention have a particle size of 1000 Å or less, preferably 500 Å or less, more preferably
50 to 300 Å. The particle size being 1000 Å or less, provides the alloy of the present
invention excellent magnetic properties.
[0024] The proportion of the crystalline grains to the total alloy structure in the alloy
of the present invention may be determined experimentally by an X-ray diffraction
method of the like. Briefly, on the basis of the standard value of the X-ray diffraction
intensity of the completely crystallized condition (saturated X-ray diffraction intensity
condition), the proportion of the X-ray diffraction intensity of the magnetic alloy
material sample to be examined to the standard value may be obtained experimentally.
Apart from this, it may also be determined from the ratio of the X-ray diffraction
intensity of the diffracted X-rays to be proportional to crystallization of the alloy
to the X-ray diffraction intensity by the halo effect which is specific to the amorphous
phase to be decreased with progress of crystallization of the alloy.
[0025] The average size of the crystalline particles is determined from Scheller's equation

by using bcc peak reflection of the X-ray diffraction pattern (Element of X-ray
Diffraction (Second Edition), pages 91-94, B.D. Cullity).
[0026] In general, the Fe-base soft magnetic alloy of the present invention may be produced
by a rapid melt-quenching method of forming an amorphous metal from a melt of the
above-mentioned composition. For instance, an amorphous alloy is first formed in the
form of a ribbon, powder or thin film by a single roll method, cavitation method,
sputtering method or vapor deposition method, the resulting amorphous alloy is optionally
shaped and worked into a desired shape, then it is heat-treated so that at least a
part, preferably 30 % or more of the whole, of the sample is crystallized to obtain
the alloy of the present invention.
[0027] Generally, a rapid-quenched alloy ribbon is formed by a single roll method, and this
is shaped into a determined shape such as a coiled magnetic core and then heat-treated.
The heat-treatment is effected in vacuum, in an inert gas atmosphere, such as an argon
gas or nitrogen gas atmosphere, in reducing gas atmosphere such as H₂ or in oxidizing
gas atmosphere such as air, after fully de-aired into vacuum. Preferably, it is carried
out in vacuum or in an inert gas atmosphere. The heat-treatment temperature is approximately
from 200 to 800°C, preferably approximately from 400 to 700°C, and more preferably
from 520 to 680 °C. The heat-treatment time is desired to be from 0.1 to 10 hours,
preferably from 1 to 5 hours. The heat-treatment may be effected either in the absence
or presence of a magnetic field.
[0028] By the heat treatment of the amorphous alloy being carried out in the aforementioned
range of temperature and within the aforementioned time range, the soft magnetic alloy
having excellent propertiers is obtained.
Brief Description of the Drawings
[0029] Fig. 1 is a graph showing a relationship between the crystallization temperature
of an Fe-base soft magnetic alloy and the Al content therein.
[0030] Fig. 2 is a graph showing a relationship between the coercive force (Hc) of an Fe-base
soft magnetic alloy and the composition thereof.
[0031] Fig. 3 is a graph showing a relationship between the saturation magnetization (Ms)
of an Fe-base soft magnetic alloy and the composition thereof.
[0032] Fig. 4 is a graph showing X-ray diffraction patterns of the Fe base soft magnetic
amorphous alloy, and the cristalline alloy of the present invention.
[0033] Fig. 5 is a graph showing the temperature dependence of the magnetic flux density
and the coercive force of a magnetic core of an Fe base soft magnetic alloy of the
present invention.
[0034] Fig. 6 is a graph showing the temperature dependence of the effective magnetic permeability
of a magnetic core of an Fe base soft magnetic alloy of the present invention.
[0035] Fig. 7 is a graph showing the temperature dependence of the iron loss of a magnetic
core of an Fe base soft magnetic alloy of the present invention.
[0036] Fig. 8 is a graph showing the temperature dependence of the crystal particle size
and the lattice constant of a bcc crystal of an Fe base soft magnetic alloy of the
present invention.
[0037] Fig. 9 is a graph showing the temperature dependence of the saturation magnetostriction
of an Fe base soft magnetic alloy of the present invention.
[0038] Fig. 10 is a graph showing the frequency characteristic of the effective magnetic
permeability of a magnetic core of an Fe base soft magnetic alloy of the present invention.
[0039] Fig. 11 is a graph showing the frequency characteristic of the iron loss of a magnetic
core of an Fe base soft magnetic alloy of the present invention.
[0040] Fig. 12 is a graph showing the magnetic flux density dependence of the iron loss
of a magnetic core of an Fe base soft magnetic alloy of the present invention.
[0041] Fig. 13 is a graph showing the frequency characteristic of the effective magnetic
permeability of a magnetic core of an Fe base soft magnetic alloy of the present invention.
[0042] Fig. 14 is a graph showing the frequency characteristic of the iron loss of a magnetic
core of an Fe base soft magnetic alloy of the present invention.
[0043] Fig. 15 is a graph showing B-H loop of an Fe base soft magnetic alloy of the present
invention before heat-treatment.
[0044] Fig. 16 is a graph showing B-H loop of an Fe base soft magnetic alloy of the present
invention after heat-treatment.
[0045] Fig. 17 is a graph showing X-ray diffraction patterns of the Fe base soft magnetic
amorphous alloy, and the cristalline alloy of the present invention.
The Best Mode for Carring the Invention
[0046] Examples of the present invention is described hereinafter.
Examples 1-9
[0047] A quenched ribbon sample having a width of about 1.0-5 mm and a thickness of about
14-20 µm was formed from a melt containing Fe, Si, Al, B and (Nb)in an argon gas atmosphere
of one atmosphere pressure by a single roll method. The sample was then heat-treated
for about one hour in the presence of a nitrogen gas and argon gas in the absence
of a magnetic field.
[0048] Other samples were formed in the same manner as above, except that the composition
of Fe, Si, Al, B and Nb was varied as shown in Table 1, and these were heat-treated
at an optimum temperature (°C) for about one hour and then cooled in a nitrogen stream.
The coercive force Hc (mOe) and the saturation magnetization Ms (emu/g) of the heat-treated
samples were measured. In addition, the saturation magnetostriction constant λs (×10⁻⁶)
of each sample was measured by a strain gage method. The composition of the alloy
was determined by IPC analysis.
[0049] The iron loss of each of the thus heat-treated coiled magnetic core samples was determined
from an area as surrounded by the alternating current hysteresis loop measured with
a digital oscilloscope under the condition of a frequency of 100 kHz and a maximum
magnetic flux density of 0.1 T. The permeability (µ) of each of them was determined
by measuring the inductance L with an LCR meter under the condition of a frequency
of 100 kHz and an exciting magnetic field of 5 mOe. The results obtained are also
shown in Table 1 below.
[0050] As comparative samples, Fe₇₈Si₉B₁₃ (Comparative Example 1, commercial product) and
FeCuSiBNb (Comparative Example 2, Cu-containing Fe-base soft magnetic alloy described
in Japanese Patent Application Laid-Open No. 64-79342) were prepared, and the coercive
force, saturation magnetization, iron loss and permeability of these samples were
also shown in Table 1 below.
Table 1
|
Composition |
Hc mOe |
Ms emu/g |
λs ×10-6 |
Iron Loss W/kg |
µ |
Particle Size Å |
Example1 |
Fe₇₃Si₈Al₁₀B₉ |
95 |
165 |
6.2 |
100 |
1000 |
- |
2 |
Fe₇₁Si₁₀Al₁₀B₉ |
85 |
136 |
5.6 |
80 |
1500 |
- |
3 |
Fe₆₇Si₁₂Al₁₂B₉ |
50 |
110 |
3.0 |
65 |
2000 |
- |
4 |
Fe₆₉Si₁₄Al₈B₉ |
38 |
110 |
2.0 |
40 |
4000 |
340 |
5 |
Fe₆₈Si₁₃Al₈B₉ |
75 |
110 |
2.2 |
45 |
2800 |
- |
6 |
Fe₆₇Si₁₆Al₈B₉ |
95 |
99 |
1.5 |
70 |
1700 |
- |
7 |
Fe₆₈Si₁₄Al₈B₉Nb₁ |
10 |
96 |
1.2 |
25 |
5400 |
300 |
8 |
Fe₆₇Si₁₄Al₈B₉Nb₂ |
15 |
92 |
1.0 |
18 |
7200 |
- |
9 |
Fe₆₆Si₁₄Al₈B₉Nb₃ |
15 |
88 |
0.6 |
10 |
20000 |
140 |
Comp. Example1 |
Fe₇₈Si₉B₁₃ |
50 |
167 |
27 |
40 |
6000 |
- |
2 |
Fe73. 5Si13. 5B₉Cu₁Nb₃ |
15 |
140 |
2.3 |
15 |
17000 |
- |
[0051] As is obvious from the results in Table 1 above, the sample of Example 7 containing
Nb as M' had a much lower coercive force value than the other FeSiB samples. The value
of the coercive force of the sample of Example 7 is almost same as that of the sample
of Comparative Example 2 (15 mOe). The samples of Examples 3 and 4 had magnetic properties,
with the exception of permeability and saturation magnetization, comparable or superior
to those of FeSiB amorphous alloys of comparative Examples 1 and 2.
[0052] The sample of Example 9 had superior magnetic properties as to permeability, iron
loss and magnetostriction than those of Comparative Example 1 and 2.
[0053] Fig. 2 is a graph showing the composition dependence of the coercive force Hc of
various Fe-Si-Al-B alloy samples, in which the compositions as surrounded by the line
gave a good soft magnetic characteristic of having a coercive force of not more than
100 mOe.
[0054] Fig. 3 is a graph showing the composition dependence of the saturation magnetization
Ms of various Fe-Si-Al-B alloy samples, in which a sample (Fe₇₃Si₈Al₁₀B₉) having a
high saturation magnetization of 165 emu/g was obtained from the composition range
having a coercive force Hc of not higher than 100 mOe.
[0055] Of these samples, the sample of Example 4 (Fe₆₉Al₈Si₁₄B₉) and the sample of Example
7 (Fe₆₈Al₈Si₁₄B₉Nb₁) having a smaller coercive force than the conventional FeSiB amorphous
alloy sample (Comparative Example 1) were measured with respect to the crystal constant
a (A), the crystal particle size D (A), the first crystallization temperature TX₁
(°C) and the second crystallization temperature TX₂ (°C). The data measured are shown
in Table 2 below.
Table 2
|
TX₁ (°C) |
TX₂ (°C) |
D (Å) |
a (Å) |
Examle 4 |
475 |
560 |
340 |
2.86 |
7 |
485 |
610 |
300 |
2.85 |
Comp. Example 1 |
493 |
523 |
- |
- |
[0056] The Table 2 data show that the ΔT value for the Examples 4 and 7 of the present invention
are significantly larger than that of the Comparative Example 2. From the data shown
in Table 2 above, it has been confirmed that the alloys of the present invention had
crystalline particles of bcc solid solution, having a particle size of approximately
300 Å and consisting mainly of iron, as formed by crystallization to be conducted
by heat-treatment.
[0057] The first crystallization temperature TX₁ is a temperature at which the Fe-base soft
magnetic alloy samples may be produced by the use of a conventional heat-treatment
device. Regarding the relationship between the first crystallization temperature TX₁
and the second crystallization temperature TX₂ of these samples, the difference between
the two temperatures TX₁ and TX₂ was 95°C in the sample of Example 4 and was 125°C
in the sample of Example 7, and in the comparative Example 2 was 30°C. From the data,
it is understood that formation of crystals interfering with the soft magnetic property
of the alloys may well be retarded by selection of the adequate heat-treatment temperature.
[0058] The alloy of Example 9 (Fe₆₆Si₁₄Al₈Nb₃B₉), which has especially excellent characteristics
of high permeability, low iron loss and low magnetostriction, was investigated and
examined in more detail, and the results of the examination are mentioned below.
[0059] Precisely, the alloy was formed into a ribbon sample having a width of 2.8 mm and
a thickness of 17 µm by a single roll method. X-ray diffraction image of the ribbon
sample was obtained, immediately after quenched or after heat-treated in a nitrogen
gas atmosphere at 580°C for one hour. Fig. 4 shows the X-ray diffraction curves obtained,
in which (a) indicates the quenched sample and shows a halo pattern which is specific
to an amorphous alloy, and (b) indicates the heat-treated sample and shows a diffraction
peak of specific bcc crystals. Specifically, the pattern (b) gives a peak indicating
regular lattice reflection of DO₃ structure in the low angle region.
[0060] The ribbon sample of the alloy of Example 9 (Fe₆₆Si₁₄Al₈Nb₃B₉) was formed into a
coiled magnetic core having an inner diameter of 15 mm, an outer diameter of 19 mm
and a height of 2.8 mm, which was then heat-treated in a nitrogen atmosphere for one
hour. The heat-treatment temperature dependence of the magnetic flux density B₁₀ (T)
and the coercive force Hc (mOe) of the coiled magnetic core sample under an applied
magnetic field of 100 e was examined, which is shown in Fig. 5. As is obvious from
Fig. 5, the magnetic flux density B10 is approximately 0.7 T in the heat-treatment
temperature range of from 550°C to 670°C. Regarding the coercive force Hc, it has
the minimum value of 12 mOe at 580°C and increases with elevation of the heat-treatment
temperature.
[0061] Fig. 6 and Fig. 7 each show the heat-treatment temperature dependence of the effective
magnetic permeability µe of the coiled magnetic core sample at various frequency and
that of the iron loss (100 KHz, 0.1T) of the same, respectively. From Fig. 6, it is
noted that the effective magnetic permeability µe has the maximum value at 580°C in
a low frequency region (10 KHz or less) and then gradually decreases with elevation
of the heat-treatment temperature in the same region. On the other hand, it is further
noted that in a high frequency region (100 KHz or more), the temperature of giving
the maximum value of the effective magnetic permeability is shifted to a high temperature
side with elevation of the frequency. From Fig. 7, it is noted that the iron loss
is satisfactorily low or is almost 10 W/g or so in the heat-treatment temperature
range of from 580°C to 670°C.
[0062] Regarding the alloy of Example 9 as heat-treated for one hour in a nitrogen gas atmosphere,
Fig. 8 shows the heat-treatment temperature dependence of the crystal particle size
D₁₁₀ (Å) as derived from the half-value width of the (110) diffraction intensity peak
of bcc crystal of the alloy by the use of a Sheller's formula and the heat-treatment
temperature dependence of the lattice constant a (Å) as obtained from the (110) diffraction
peak of the bcc crystal of the same. As is obvious from Fig. 8, the crystal particle
size is always almost 140 A or so, irrespective of elevation of the heat-treatment
temperature. On the other hand, however, it is noted that the lattice constant gradually
decreases with elevation of the heat-treatment temperature.
[0063] Fig. 9 shows the heat-treatment temperature dependence of the saturation magnetostriction
constant λs (x 10⁻⁶) of the alloy of Example 9 as heat-treated in a nitrogen gas atmosphere
for one hour. As is obvious from Fig. 9, the saturation magnetostriction gradually
decreases with elevation of the heat-treatment temperature. In particular, it is noted
that the alloy sample shows an almost zero magnetostriction in a heat-treatment temperature
range of 600°C or higher.
[0064] A coiled magnetic core having an inner diameter of 15 mm, an outer diameter of 19
mm and a height of 2.8 mm was made of the alloy of example 9 of the present invention,
which was heat-treated at 580°C or 600°C. Fig. 10 shows the frequency characteristic
of the effective magnetic permeability µe of each of the two heat-treated coiled magnetic
core samples. It also shows the frequency characteristic of the effective magnetic
permeability of alloys of Comparative Example 1 and Comparative Example 2 and a typical
Mn-Zn ferrite. From Fig. 10, it is noted that the alloy of the present invention has
a larger magnetic permeability value than the conventional amorphous alloy (Comparative
Example 1) and Mn-Zn ferrite. In addition, in comparison with the fine crystalline
soft magnetic alloy having a good frequency characteristic (Comparative Example 2),
it is noted that the alloy of the present invention has a higher effective magnetic
permeability in a high frequency region of 100 KHz or more. From the data, it is understood
that the alloy of the present invention is a novel fine crystalline soft magnetic
alloy having excellent magnetic characteristics in a high frequency region.
[0065] Fig. 11 and Fig. 12 each show the frequency dependence (characteristic) and the magnetic
flux density dependence, respectively, of the iron loss (W/g) of the Example 9 (580°C)
coiled magnetic core sample as above. These also show the frequency dependence and
the magnetic flux density dependence, respectively, of the iron loss of alloys of
Comparative Example 1 and Comparative Example 2 and a typical Mn-Zn ferrite. Regarding
the frequency dependence of the iron loss of each sample which is shown in Fig. 11,
it is noted that the alloy of the present invention has a smaller iron loss than conventional
amorphous alloy, Mn-Zn ferrite and fine crystalline soft magnetic alloy in a frequency
range of from 10 KHz to 700 KHz. Regarding the magnetic flux density dependence of
the iron loss of each sample which is shown in Fig. 12, it is noted that the alloy
of Example 9 (580°C) has a smaller iron loss than conventional amorphous alloy, Mn-Zn
ferrite and fine crystalline soft magnetic alloy in a magnetic flux density range
of from 0.1 T to 0.5 T. These results show that the alloy of the present invention
has an excellent magnetic properties compared to the conventional alloy.
Examples 10-25
[0066] A amorphous ribbon having a width of about 1.3 mm and a thickness of about 18 µm
was formed from a melt containing Fe, Si, Al, B and Nb in an argon gas atmosphere
of one atmosphere pressure by a single roll method. The ribbon of the alloy was formed
into a coiled magnetic core having an inner diameter of 15 mm, an outer diameter of
19 mm and a height of 1.3 mm. After the coiled core was optimum heat-treated in the
absence of a magnetic field, the coercive force Hc (mOe), the saturation magnetostriction
constant λs (×10⁻⁶), the effective permeability (µ) (a frequency of 100 KHz, an exciting
magnetic field of 5mOe) and the iron loss (a frequency of 100 KHz, a maximum magnetic
flux density of 0.1T) of each core were measured. The composition of the samples and
the results obtained are shown in Table 3 below.
Table 3
|
Coercive force (mOe) |
Saturation Magneization (× 10⁻⁶) |
Permeability (100KHz,5mOe) |
Iron Loss(W/kg) (100KHz,0.1T) |
Particle Size (Å) |
Example10 |
46 |
1.8 |
4000 |
52 |
160 |
11 |
36 |
1.5 |
3400 |
50 |
155 |
12 |
26 |
0.6 |
5600 |
30 |
145 |
13 |
22 |
0.5 |
3100 |
50 |
135 |
14 |
46 |
1.0 |
5400 |
30 |
160 |
15 |
30 |
1.1 |
8300 |
17 |
150 |
16 |
28 |
0.5 |
8600 |
20 |
145 |
17 |
16 |
0.2 |
8000 |
22 |
130 |
18 |
25 |
0.5 |
8600 |
22 |
160 |
19 |
28 |
0.1 |
9100 |
20 |
140 |
20 |
40 |
∼0 |
8000 |
17 |
155 |
21 |
28 |
0.3 |
4400 |
28 |
165 |
22 |
26 |
0.1 |
9400 |
16 |
150 |
23 |
40 |
-0.2 |
4300 |
30 |
155 |
24 |
28 |
0.4 |
4400 |
28 |
160 |
25 |
42 |
-0.8 |
2200 |
50 |
165 |
Example 10 |
Fe₆₉Si₁₂Al₇Nb₃B₉ |
Example 11 |
Fe₆₈Si₁₂Al₈Nb₃B₉ |
Example 12 |
Fe₆₇Si₁₂Al₉Nb₃B₉ |
Example 13 |
Fe₆₆Si₁₂Al₁₀Nb₃B₉ |
Example 14 |
Fe₆₈Si₁₃Al₇Nb₃B₉ |
Example 15 |
Fe₆₇Si₁₃Al₈Nb₃B₉ |
Example 16 |
Fe₆₆Si₁₃Al₉Nb₃B₉ |
Example 17 |
Fe₆₅Si₁₃Al₁₀Nb₃B₉ |
Example 18 |
Fe₆₇Si₁₄Al₇Nb₃B₉ |
Example 19 |
Fe₆₅Si₁₄Al₉Nb₃B₉ |
Example 20 |
Fe₆₄Si₁₄Al₁₀Nb₃B₉ |
Example 21 |
Fe₆₆Si₁₅Al₇Nb₃B₉ |
Example 22 |
Fe₆₅Si₁₅Al₈Nb₃B₉ |
Example 23 |
Fe₆₄Si₁₅Al₉Nb₃B₉ |
Example 24 |
Fe₆₅Si₁₆Al₇Nb₃B₉ |
Example 25 |
Fe₆₄Si₁₆Al₈Nb₃B₉ |
[0067] As is obvious from the results in Table 3 above, the alloy of the example 10-25 including
no Ni shows very low magnetostriction in the range of 7-10 atomic % of the Al content.
Examples 26-39 Comparative Example 3
[0068] A amorphous ribbon having a width of about 2.8 mm and a thickness of about 18 µm
was formed by the same process of example 10 and the ribbon of the alloy was formed
into a coiled magnetic core having an inner diameter of 15 mm, an outer diameter of
19 mm and a height of 2.8 mm. After the coiled core was optimum heat-treated in the
absence of a magnetic field, the effective permeability (µ) (a frequency of 100 KHz,
an exciting magnetic field of 5mOe) and the iron loss (a frequency of 100 KHz, a maximum
magnetic flux density of 0.1T) of each core were measured. The composition of the
samples and the results obtained are shown in Table 4 below.
Table 4
|
Composition (atom%) |
Permeability µ (100KHz,5mOe) |
Iron Loss(W/kg) (100KHz,0.1T) |
Example 26 |
Fe65. 5Si₁₄Al₈Nb₃B9. 5 |
14000 |
12 |
27 |
Fe₆₅Si₁₄Al₈Nb3. 5B9. 5 |
19000 |
9 |
28 |
Fe₆₅Si13. 9Al7. 8Nb3. 3B₁₀ |
20000 |
10 |
29 |
Fe₆₄Si₁₄Al₈Nb₄B₁₀ |
17000 |
10 |
30 |
Fe₆₄Si13. 5Al7. 5Nb₄B₁₁ |
12000 |
12 |
31 |
Fe₆₅Si₁₄Al₈Nb₄B9. 5 |
16000 |
14 |
32 |
Fe₆₉Si₁₃Al₄Nb₄B₁₀ |
7000 |
22 |
33 |
Fe₆₇Si₁₃Al₆Nb₄B₁₀ |
12000 |
16 |
34 |
Fe63. 7Si₁₃Al₁₀Nb3. 3B₁₀ |
14000 |
9 |
35 |
Fe₆₁Si₁₃Al₁₂Nb₄B₁₀ |
10000 |
16 |
36 |
Fe63. 5Si₁₃Al7. 5Nb₄B₁₂ |
9000 |
18 |
37 |
Fe₆₀Si12. 8Al7. 2Nb₆B₁₄ |
7800 |
20 |
38 |
Fe₆₁Si₁₆Al₉Nb₄B₁₀ |
5000 |
34 |
39 |
Fe₅₈Si₁₈Al₁₀Nb₄B₁₀ |
4200 |
46 |
[0069] As is obvious from the results in Table 4 above, the alloy including more than 9
atomic % of B shows a low iron loss and a high permeability.
Examples 40-59
[0070] A amorphous ribbon having a width of about 1.3 mm and a thickness of about 18 µm
was formed from a melt containing Fe, Si, Al, B, and M' in an argon gas atmosphere
of one atmosphere pressure by a single roll method. The ribbon of the alloy was formed
into a coiled magnetic core having an inner diameter of 15 mm, an outer diameter of
19 mm and a height of 1.3 mm. After the coiled core was optimum heat-treated in the
absence of a magnetic field, the coercive force Hc (mOe), the permeability (µ) (a
frequency of 100 KHz, an exciting magnetic field of 5mOe) and the iron loss (a frequency
of 100 KHz, a maximum magnetic flux density of 0.1T)of each core were measured. The
composition of the samples and the results obtained are shown in Table 5 below.
Table 5
|
Coercive Force (mOe) |
Permeability (100KHz,5mOe) |
Iron Loss(W/kg) (100KHz,0.1T) |
Example 40 |
26 |
13800 |
15 |
41 |
56 |
13200 |
12 |
42 |
18 |
4000 |
40 |
43 |
22 |
5000 |
30 |
44 |
28 |
6000 |
24 |
45 |
20 |
14000 |
15 |
46 |
50 |
4200 |
40 |
47 |
22 |
11000 |
18 |
48 |
24 |
11000 |
15 |
49 |
28 |
5000 |
26 |
50 |
20 |
12000 |
18 |
51 |
28 |
8000 |
24 |
52 |
28 |
8200 |
22 |
53 |
32 |
11000 |
18 |
54 |
26 |
9000 |
20 |
55 |
26 |
8000 |
28 |
56 |
30 |
8000 |
32 |
57 |
28 |
7000 |
30 |
58 |
46 |
6000 |
26 |
59 |
42 |
5200 |
42 |
Example 40 |
Fe₆₆S₁₄Al₈Mo₃B₉ |
41 |
Fe₆₆Si₁₄Al₈Ta₃B₉ |
42 |
Fe₆₆Si₁₄Al₈Cr₃B₉ |
43 |
Fe₆₆Si₁₄Al₈V₃B₉ |
44 |
Fe₆₆Si₁₄Al₈Ti₃B₉ |
45 |
Fe₆₆Si₁₄Al₈W₃B₉ |
46 |
Fe₆₆Si₁₄Al₈Mn₃B₉ |
47 |
Fe₆₆Si₁₄Al₈Hf₃B₉ |
48 |
Fe₆₆Si₁₄Al₈Zr₃B₉ |
49 |
Fe₆₆Si₁₄Al₈Y₃B₉ |
50 |
Fe₆₄Si₁₄Al₈Nb₂Mo₂B₁₀ |
51 |
Fe₆₂Si₁₃Al₈Nb₃Ta₂B₁₂ |
52 |
Fe₆₃Si₁₃Al₈Nb₃Zr₁B₁₂ |
53 |
Fe₆₅Si₁₃Al₈Mo₂W₂B₁₀ |
54 |
Fe₆₃Si₁₃Al₇Nb₄Pd₃B₁₀ |
55 |
Fe₆₃Si₁₃Al₆Nb₄Ru₄B₁₀ |
56 |
Fe₆₆Si₁₄Al₄Ga₄Nb₄B₁₀ |
57 |
Fe₆₆Si₁₄Al₆Ge₃Nb₄B₁₀ |
58 |
Fe₆₁Si₁₄Al₈Zr₄B₉C₄ |
59 |
Fe₆₃Si₁₄Al₆Zr₄B₁₀P₃ |
[0071] As is obvious from the results in Table 5 above, both amorphous alloys including
an other element than Nb as M'(examples 40-49, 53, 53 and 59) and alloys including
the element together with Nb show excellent magnetic characteristics.
Examples 60-66
[0072] A amorphous ribbon having a width of about 1.3 mm and a thickness of about 18 µm
was formed by the same process of example 10 and the ribbon of the alloy was formed
into a coiled magnetic core having an inner diameter of 15 mm, an outer diameter of
19 mm and a height of 1.3 mm. After the coiled core was optimum heat-treated in the
absence of a magnetic field, the effective permeability (µ) (a frequency of 100 KHz,
an exciting magnetic field of 5mOe) and the iron loss (a frequency of 100 KHz, a maximum
magnetic flux density of 0.1T) of each core were measured. The composition of the
samples and the results obtained are shown in Table 6 below.
Table 6
|
Composition (atom%) |
Permeability µ (100KHz) |
Iron Loss(W/kg) (100KHz,0.1T) |
Example 60 |
Fe₇₅Si₈Al₅Nb₃B₉ |
3400 |
40 |
61 |
Fe₇₄Si₉Al₅Nb₃B₉ |
4600 |
37 |
62 |
Fe₇₄Si₈Al₆Nb₃B₉ |
2600 |
46 |
63 |
Fe₇₃Si₁₀Al₅Nb₃B₉ |
2000 |
58 |
64 |
Fe₇₁Si₉Al₆Nb₄B₁₀ |
5100 |
32 |
65 |
Fe69. 7Si8. 6Al5. 7Nb₄B₁₂ |
5000 |
36 |
66 |
Fe₆₆Si₈Al₅Nb₅B₁₆ |
1000 |
100 |
Examples 67-81
[0073] A amorphous ribbon having a width of about 2.8 mm and a thickness of about 18 µm
was formed by the same process of example 10 and the ribbon of the alloy was formed
into a coiled magnetic core having an inner diameter of 15 mm, an outer diameter of
19 mm and a height of 2.8 mm. After the coiled core was optimum heat-treated in the
absence of a magnetic field, the effective permeability (µ) (a frequency of 100 KHz,
an exciting magnetic field of 5mOe) and the iron loss (a frequency of 100 KHz, a maximum
magnetic flux density of 0.1T) of each core were measured. The composition of the
samples and the results obtained are shown in Table 7 below.
Table 7
|
Before Heat-treatment |
After Heat-treatme |
Particle Size Å |
|
In the Presence of a Magnetic Field |
|
|
Permeability (100KHz,5mOe) |
Iron Loss (W/Kg) (100KHz,0.1T) |
Permeability (100KHz,5mOe) |
Iron Loss (W/Kg) (100KHz,0.1T) |
|
Example67 |
9000 |
20 |
10000 |
14 |
140 |
68 |
13000 |
13 |
14000 |
9 |
140 |
69 |
13000 |
12 |
10000 |
9 |
140 |
70 |
13000 |
12 |
9000 |
8 |
140 |
71 |
6000 |
30 |
5000 |
18 |
150 |
72 |
8000 |
25 |
9000 |
15 |
- |
73 |
10000 |
20 |
9000 |
15 |
150 |
74 |
11000 |
18 |
9400 |
12 |
150 |
75 |
10000 |
16 |
9000 |
12 |
150 |
76 |
9800 |
20 |
9600 |
16 |
- |
77 |
9600 |
18 |
8800 |
12 |
- |
78 |
9400 |
16 |
9000 |
12 |
- |
79 |
8600 |
18 |
8600 |
14 |
- |
80 |
8400 |
18 |
8600 |
14 |
- |
81 |
8600 |
20 |
8800 |
16 |
- |
Example 67 |
Fe₆₆Ni1. 6Si₁₄Al6. 4Nb₃B₉ |
68 |
Fe₆₆Ni3. 2Si₁₄Al4. 8Nb₃B₉ |
69 |
Fe₆₆Ni₄Si₁₄Al₄Nb₃B₉ |
70 |
Fe₆₆Ni4. 8Si₁₄Al3. 2Nb₃B₉ |
71 |
Fe₆₆Ni5. 5Si₁₄Al2. 5Nb₃B₉ |
72 |
Fe69. 4Ni2. 4Si9. 6Al6. 6Nb₃B₉ |
73 |
Fe₆₆Ni2. 8Si11. 2Al₈Nb₃B₉ |
74 |
Fe₆₅Ni₄Si₁₄Al₄Nb3. 5B9. 5 |
75 |
Fe₆₅Ni4. 8Si₁₄Al3. 2Nb3. 5B9. 5 |
76 |
Fe₆₄Ni₄Si₁₄Al₄Nb₄B₁₀ |
77 |
Fe64. 5Ni4. 8Si13. 5Al3. 2Nb₄B₁₀ |
78 |
Fe₆₄Ni₄Si₁₃Al₄Nb₄B₁₁ |
79 |
Fe₆₃Ni4. 8Si₁₃Al3. 2Nb₄B₁₂ |
80 |
Fe₆₂Ni4. 5Si₁₃Al₄Nb4. 5B₁₂ |
81 |
Fe₅₉Ni₄Si₁₃Al₄Nb₆B₁₄ |
[0074] As is obvious from the results in Table 7 above, the alloy of these examples shows
an excellent value of an iron loss as well as a permeability.
[0075] Further, the frequency dependence of the effect permeability (µ) and the iron loss
of the Example 69 ( ⃝) which was heat-treated in the absence of a magnetic field was
measured. At the same time, the frequency dependence of the effect permeability (µ)
and the iron loss of the Example 69 (●) which was heat-treated in the presence of
a magnetic field was measured. The results obtained are shown in Figs. 13 and 14.
B-H loops in the exciting magnetic field (Hm) of 100 e, 10 e and 0.10 e are also illustrated
in Figs. 15 and 16.
[0076] As is obvious from Fig. 13, the alloy of the present invention showed a high permeability
in the high frequency range of 100 kHz or more by heat-treating in the presence of
a magnetic field. Particularly in the range of 200 kHz or more, the alloy of the present
invention showed higher permeability than that (Δ) of the ribbon (a comparative example
2, a width of 5 mm and a thickness of 18 µm) of a soft magnetic alloy having a good
frequency characteristic which was heat-treated in the presence of a magnetic field.
[0077] As is obvious from Fig. 14, the iron loss of the alloy of the present invention was
sharply reduced by heat-treating in the presence of a magnetic field. The value of
the iron loss is lower than that (Δ) of the ribbon (a comparative example 2, a width
of 5 mm and a thickness of 18 µm) which was heat-treated in the presence of a magnetic
field.
[0078] Further, as is obvious from comparison of B-H loop of the pre-heat-treated alloy
and that of the heat-treated alloy, the alloy of the present invention showed excellent
soft magnetic properties by heat-treatment in the presence of a magnetic field. X-ray
diffraction image of Example 69 which was heat- treated for one hour in a nitrogen
atmosphere is shown in Fig. 17.
Examples 82-86
[0079] A amorphous ribbon (Fe-Co-Si-Al-Nb-B) having a width of about 2.8 mm and a thickness
of about 18 µm was formed by the same process of example 10 and the ribbon of the
alloy was formed into a coiled magnetic core having an inner diameter of 15 mm, an
outer diameter of 19 mm and a height of 2.8 mm. After the coiled core was optimum
heat-treated in the absence of a magnetic field, further heat-treated in the presence
of a magnetic field. The permeability (µ) (a frequency of 100 KHz, an exciting magnetic
field of 5mOe) and the iron loss (a frequency of 100 KHz, a maximum magnetic flux
density of 0.1T) of both pre-heat-treated core and a heat-treated core in a magnetic
field were measured. The composition of the alloy and the results obtained are shown
in Table 8 below.
Table 8
|
Before Heat-treatment |
After Heat-treatment |
|
In the Presence of a Magnetic Field |
|
Iron Loss (W/Kg) (100KHz,0.1T) |
Permeability (100KHz,5mOe) |
Iron Loss (W/Kg) (100KHz,0.1T) |
Permeability (100KHz,5mOe) |
Example 82 |
18 |
11000 |
13 |
12000 |
83 |
16 |
7100 |
14 |
7200 |
84 |
28 |
3900 |
24 |
3800 |
85 |
57 |
2800 |
48 |
2800 |
86 |
30 |
5100 |
25 |
6000 |
Example 82 |
Fe₆₆Co1. 6Si₁₄Al6. 4Nb₃B₉ |
83 |
Fe₆₆Co3. 2Si₁₄Al4. 8Nb₃B₉ |
84 |
Fe₆₆Co₄Si₁₄Al₄Nb₃B₉ |
85 |
Fe₆₆Co2. 8Si11. 2Al₈Nb₃B₉ |
86 |
Fe₆₆Co5. 6Si8. 4Al₈Nb₃B₉ |
[0080] As is obvious from the results in Table 8 above, the alloy including Co instead of
Ni shows as low iron loss as that including Ni, whereas some examples having Co show
a lower permeability than the latter.
[0081] The content of crystal (fine crystalline particles) is 60 % or more in the alloy
of the all examples above.
Capabilityof Exploitation in Industry
[0082] As is obvious from the results in the above-mentioned examples, the present invention
provides a novel Fe-base soft magnetic alloy as prepared by adding Al to an Fe-Si-B
alloy composition, and the alloy has excellent soft magnetic properties. In addition,
since the Fe-base soft magnetic alloy of the present invention has a large temperature
difference between the crystallization temperature of crystals of showing a good soft
magnetic property and the crystallization temperature of crystals of interfering with
a soft magnetic property, the range of the temperature of heat treatment is sufficiently
wider than that of the conventional amorphous alloys.
[0083] The Fe-base soft magnetic alloy of the present invention shows a very low magnetostriction
by adding Al thereto and at the same time substituting Ni (Co) for a part of Fe, whereby
a magnetic core having a low iron loss can be obtained.
[0084] Furthermore, in accordance with the present invention, Nb or the like element may
be added to an Fe-Si-Al-B alloy composition to give a novel Fe-base soft magnetic
alloy having excellent soft magnetic properties, especially having an extremely low
coercive force, low iron loss and low magnetostriction as well as a high permeability
in a high frequency region.
[0085] Since the alloy of the present invention possesses excellent properties as above-mentioned,
it is useful for such applications as (material for magnetic core of) a high-frequency
transformer, a common-mode choke coil, a magnetic amplifier, an inductor for filters,
a transformer for signals, a magnetic head and so on.
1. An Fe-base soft magnetic alloy having a composition as represented by the general
formula:
(Fe1-xMx)100-a-b-c-dSiaAlbBcM'd
where M is Co and/or Ni;
M' is at least one element selected from the group consisting of Nb, Mo, Zr, W, Ta,
Hf, Ti, V, Cr, Mn, Y, Pd, Ru, Ga, Ge, C and P;
x is an atomic ratio;
a, b, c and d each are an atomic %; and
x, a, b, c and d each satisfy 0 ≦ x ≦ 0.15, 0 ≦ a ≦ 24, 2 < b ≦ 15, 4 ≦ c ≦ 20, and
0 ≦ d ≦ 10.
2. The Fe-base soft magnetic alloy as claimed in claim 1, in which at least 30 % of the
alloy structure is occupied by a crystalline phase with the balance being an amorphous
phase.
3. The Fe-base soft magnetic alloy as claimed in claim 2, in which the crystalline phase
is bcc solid solution consisting mainly of iron.
4. The Fe-base soft magnetic alloy as claimed in claim 1, in which M' is Nb.
5. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content(x) of
M is x=0.
6. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (x) of
M is 0.02 ≦ x ≦ 0.15.
7. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (x) of
M is 0.03 ≦ x ≦ 0.1.
8. The Fe-base soft magnetic alloy as claimed in claim 1, in which M is Ni.
9. The Fe-base soft magnetic alloy as claimed in claim 6, in which M is Ni.
10. The Fe-base soft magnetic alloy as claimed in claim 7, in which M is Ni.
11. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (b) of
Al is 2.5 ≦ b ≦ 15.
12. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (b) of
Al is 3 ≦ b ≦ 12.
13. The Fe-base soft magnetic alloy as claimed in claim 8, in which the content (b) of
Al is 3 ≦ b ≦ 10.
14. The Fe-base soft magnetic alloy as claimed in claim 5, in which the content (b) of
Al is 7 ≦ b ≦ 12.
15. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (c) of
B is 6 ≦ c ≦ 15.
16. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (c) of
B is 9.5 ≦ c ≦ 15.
17. The Fe-base soft magnetic alloy as claimed in claim 1, in which the content (c) of
B is 10 ≦ c ≦ 14.