STAIRCASE SIDEWALL SPACER FOR IMPROVED SOURCE/DRAIN ARCHITECTURE - Patent 0521947

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EP 0 521 947 A1

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(43)	Date of publication:
	13.01.1993 Bulletin 1993/02

(21)	Application number: 91906458.0

(22)	Date of filing: 11.03.1991

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International Patent Classification (IPC):

H01L 21/ 336^{( . )}
H01L 29/ 78^{( . )}

H01L 21/ 8238^{( . )}

(86)	International application number:
	PCT/US1991/001619

(87)	International publication number:
	WO 1991/015030 (03.10.1991 Gazette 1991/23)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FR GB GR IT LI LU NL SE

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Priority:

27.03.1990 US 19900499783

(71)	Applicant: SEMATECH, INC.
	Austin, TX 78741-6499 (US)

(72)	Inventors:
	MANUKONDA, V., Reddy Austin, TX 78746 (US) SEIDEL, Thomas, E. Austin, TX 78745 (US)

(74)	Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
	Maximilianstrasse 58 D-80538 München D-80538 München (DE)

(54)	STAIRCASE SIDEWALL SPACER FOR IMPROVED SOURCE/DRAIN ARCHITECTURE