(19)

(11)

EP 0 533 859 A1

(12)

(43) Date of publication: 31.03.1993 Bulletin 1993/13 (21) Application number: 92905157.0 (22) Date of filing: 21.01.1992

(51) International Patent Classification (IPC):  B65D 85/ 00( . ) H01L 21/ 673( . ) B65D 85/ 86( . ) (86) International application number: PCT/US1992/000506 (87) International publication number: WO 1992/019012 (29.10.1992 Gazette 1992/27)

(84) Designated Contracting States: CH DE FR GB IT LI NL (30) Priority: 11.04.1991 US 19910683705 (71) Applicant: FLUOROWARE, INC. Chaska, MN 55318 (US)	(72) Inventor: MIKKELSEN, Kirk, J. Chanhassen, MN 55317 (US) (74) Representative: Rinuy, Santarelli  14, avenue de la Grande Armée F-75017 Paris F-75017 Paris (FR)