(19)
(11)
EP 0 539 365 A1
(12)
(43)
Date of publication:
05.05.1993
Bulletin 1993/18
(21)
Application number:
90916570.0
(22)
Date of filing:
17.10.1990
(51)
International Patent Classification (IPC):
H01J
1/
304
( . )
H01J
9/
02
( . )
H01J
1/
30
( . )
(86)
International application number:
PCT/US1990/005964
(87)
International publication number:
WO 1992/002031
(
06.02.1992
Gazette 1992/04)
(84)
Designated Contracting States:
BE CH DE DK ES FR GB IT LI NL SE
(30)
Priority:
18.07.1990
US 19900555213
(71)
Applicant:
International Business Machines Corporation
Armonk, N.Y. 10504 (US)
(72)
Inventor:
ZIMMERMAN, Stephen, Michael
Pleasant Valley, NY 12569 (US)
(74)
Representative:
Schuffenecker, Thierry
Compagnie IBM France, Département de Propriété Intellectuelle
F-06610 La Gaude
F-06610 La Gaude (FR)
(54)
STRUCTURES AND PROCESSES FOR FABRICATING FIELD EMISSION CATHODES