(19)

(11)

EP 0 556 177 A1

(12)

(43) Date of publication: 25.08.1993 Bulletin 1993/34 (21) Application number: 91906782.0 (22) Date of filing: 21.12.1990

(51) International Patent Classification (IPC):  G03F 7/ 039( . ) G03F 7/ 11( . ) G03F 7/ 09( . ) H01L 21/ 027( . ) (86) International application number: PCT/US1990/007618 (87) International publication number: WO 1992/005474 (02.04.1992 Gazette 1992/08)

(84) Designated Contracting States: DE FR GB IT (30) Priority: 18.09.1990 US 19900587273 (71) Applicant: International Business Machines Corporation Armonk, N.Y. 10504 (US)

(72) Inventors: CONLEY, Willard, Earl Cornwall, NY 12518 (US) KWONG, Ranee, Wai-Ling Wappingers Falls, NY 12590 (US) KVITEK, Richard, Joseph Wappingers Falls, NY 12590 (US) LANG, Robert, Neal Pleasant Valley, NY 12569 (US) LYONS, Christopher, Francis La Grangeville, NY 12540 (US) MIURA, Steve, Seiichi Poughkeepsie, NY 12603 (US) MOREAU, Wayne, Martin Wappingers Falls, NY 12590 (US) SACHDEV, Harbans, Singh Hopewell Junction, NY 12533 (US) WOOD, Robert, Lavin Poughkeepsie, NY 12603 (US) (74) Representative: Schuffenecker, Thierry, et al  Compagnie IBM France, Département de Propriété Intellectuelle F-06610 La Gaude F-06610 La Gaude (FR)