Self-aligned thin film transistors in an active matrix array - Patent 0557514

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EP 0 557 514 A1

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(43)	Date of publication:
	01.09.1993 Bulletin 1993/35

(21)	Application number: 92920552.0

(22)	Date of filing: 18.09.1992

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International Patent Classification (IPC):

H01L 29/ 786^{( . )}

(86)	International application number:
	PCT/US1992/007929

(87)	International publication number:
	WO 1993/006623 (01.04.1993 Gazette 1993/09)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FR GB GR IT LI NL SE

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Priority:

18.09.1991 US 19910761517

(71)	Applicant: AMOCO CORPORATION
	Chicago, IL 60680-0703 (US)

(72)	Inventors:
	BUSTA, Heinz, Hermann Park Ridge, IL 60068 (US) POGEMILLER, Jay, Evan Joliet, IL 60436 (US)

(74)	Representative: Low, Peter John
	Wilson, Gunn, M'Caw & Co., 41-51 Royal Exchange, Cross Street Manchester, M2 7BD Manchester, M2 7BD (GB)

(54)	Self-aligned thin film transistors in an active matrix array