(19)
(11) EP 0 577 743 A1

(12)

(43) Date of publication:
12.01.1994 Bulletin 1994/02

(21) Application number: 92910267.0

(22) Date of filing: 25.03.1992
(51) International Patent Classification (IPC): 
C08G 8/ 20( . )
G03F 7/ 038( . )
H01L 21/ 312( . )
H05K 3/ 46( . )
G03F 7/ 027( . )
H01B 3/ 42( . )
H05K 1/ 03( . )
(86) International application number:
PCT/US1992/002352
(87) International publication number:
WO 1992/017820 (15.10.1992 Gazette 1992/26)
(84) Designated Contracting States:
AT BE CH DE DK FR GB IT LI NL SE

(30) Priority: 28.03.1991 US 19910676667
28.03.1991 US 19910676675

(71) Applicant: AlliedSignal Inc.
Morristown New Jersey 07962-2245 (US)

(72) Inventor:
  • ZUPANCIC, Joseph, James
    Bensenville, IL 60106 (US)

(74) Representative: Brock, Peter William, et al 
Urquhart-Dykes & Lord 1 Richfield Place Richfield Avenue
Reading RG1 8EQ Berkshire
Reading RG1 8EQ Berkshire (GB)

   


(54) PHOTODEFINABLE INTERLEVEL DIELECTRICS