(19)
(11) EP 0 580 283 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
23.08.1995 Bulletin 1995/34

(43) Date of publication A2:
26.01.1994 Bulletin 1994/04

(21) Application number: 93304334.1

(22) Date of filing: 03.06.1993
(51) International Patent Classification (IPC)5B41J 2/16, B41J 2/045
(84) Designated Contracting States:
DE FR GB

(30) Priority: 05.06.1992 JP 145764/92
12.06.1992 JP 153808/92
08.07.1992 JP 181233/92
08.07.1992 JP 181240/92

(71) Applicant: SEIKO EPSON CORPORATION
Shinjuku-ku Tokyo-to (JP)

(72) Inventors:
  • Atobe, Mitsuro, c/o Seiko Epson Corporation
    Suwa-shi, Nagano-ken (JP)
  • Kamisuki, Shinichi, c/o Seiko Epson Corporation
    Suwa-shi, Nagano-ken (JP)
  • Yotsuya, Shinichi, c/o Seiko Epson Corporation
    Suwa-shi, Nagano-ken (JP)
  • Koeda, Hiroshi, c/o Seiko Epson Corporation
    Suwa-shi, Nagano-ken (JP)

(74) Representative: Watkins, David et al
Urquhart-Dykes & Lord, 91 Wimpole Street
London W1M 8AH
London W1M 8AH (GB)


(56) References cited: : 
   
       


    (54) Ink jet head and method of manufacturing thereof


    (57) An ink jet head 10 has nozzle holes 4, emitting chamber 6 respectively connected thereto, and vibrating plates 5 are formed at the bottom wall of the emitting chambers 6. A common ink cavity 8 is adapted to supply ink to the emitting chambers through orifices 7. Electrodes 21 are placed so as to face the vibrating plates so as to drive the vibrating plates by static electricity. One of two anode bonding faces between the first substrate 1 forming the vibrating plate 5 and the second substrate 2 forming the electrode has a dent 15 to form a vibrating chamber 9 or a dent 25 for mounting an electrode therein, or SiO₂ membranes 41 and 42, respectively formed therein. The gap length G between the vibrating plate and the electrode is determined to be between 0.05 - 2µm.







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